High accuracy method for auger analysis of the composition of uncleaned silicon oxide surface

2004 ◽  
Vol 47 (10) ◽  
pp. 1032-1038
Author(s):  
B. M. Kostishko ◽  
S. V. Appolonov ◽  
S. Ya. Salomatin
2004 ◽  
Vol 47 (10) ◽  
pp. 1032-1038 ◽  
Author(s):  
B. M. Kostishko ◽  
S. V. Appolonov ◽  
S. Ya. Salomatin

1998 ◽  
Vol 65-66 ◽  
pp. 53-58
Author(s):  
L. Hall ◽  
J. Sees ◽  
Trace Hurd ◽  
B. Schmidt ◽  
L. Bellay ◽  
...  

1987 ◽  
Vol 105 ◽  
Author(s):  
Kyung-Ho Park ◽  
T. Sasaki ◽  
S. Matsuoka ◽  
M. Yoshida ◽  
M. Nakano

AbstractInterfaces between two kind of substrate, a bulk silicon wafer and a laser-recrystallized Silicon-On-Insulator (SOI), and its thermally grown oxide have been studied. High resolution transmission electron microscopy (HRTEM) of cross sectional specimen shows that the roughness at the interface is atomically flat and nearly uniform for the bulk single crystal silicon and silicon oxide, while being nonuniform and rough as much as 20 nm height for the recrystallized silicon and silicon oxide interface. Consideration of interface between recrystallized silicon and silicon oxide, and the oxide surface above, the observed roughness at the interface is due to original grain boundaries of polycrystalline silicon which was used as the material for the laser recrystallized silicon formation. It is also discussed HRTEM of the interface between polycrystalline silicon and silicon oxide.


2005 ◽  
Vol 19 (1) ◽  
pp. 17-21 ◽  
Author(s):  
K. Strawhecker ◽  
D. B. Asay ◽  
J. McKinney ◽  
S. H. Kim

1994 ◽  
Vol 33 (Part 1, No. 1B) ◽  
pp. 379-382 ◽  
Author(s):  
Yoshinobu Fukano ◽  
Takayuki Uchihashi ◽  
Takahiro Okusako ◽  
Ayumi Chayahara ◽  
Yasuhiro Sugawara ◽  
...  

2015 ◽  
Vol 1725 ◽  
Author(s):  
Dorian Liepmann ◽  
Kiana Aran ◽  
Pulickel M. Ajayan ◽  
Sowmya Viswanathan ◽  
Pingzuo Li ◽  
...  

ABSTRACTThe need for improved medical sensors based on lab-on-a-chip technologies has increased significantly because of the dramatic growth in the number of people with chronic diseases and the associated costs for their healthcare. Development and initial results of a hybrid plastic microfluidic device with an integrated graphene-protein biosensor chip for use in point-of-care (POC) is described. The initial prototype is a glucometer that uses optimized glucose oxidase bound to a graphene field effect sensor. Technologies required for development of the prototype include modification of the glucose oxidase for improved performance by protein engineering, methods to bind the enzyme to the graphene attached to the silicon oxide surface of sensor chip, and integration into a thermoplastic microfluidic device. Initial results indicate the prototype glucometer can measure glucose concentrations from low physiological levels to molar concentrations.


2001 ◽  
Vol 34 (14) ◽  
pp. 4993-4998 ◽  
Author(s):  
K. Shin ◽  
X. Hu ◽  
X. Zheng ◽  
M. H. Rafailovich ◽  
J. Sokolov ◽  
...  

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