Study of radio frequency plasma of silane — Argon mixture by optical emission spectroscopy

2000 ◽  
Vol 50 (S3) ◽  
pp. 349-355 ◽  
Author(s):  
P. P. Ray ◽  
P. Chaudhuri
Keyword(s):  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Argon Mixture

scholarly journals Characterising the Radio Frequency Plasma Source for Glow Discharge Optical Emission Spectroscopy

2002 ◽  
Vol 42 (Suppl) ◽  
pp. S101-S105 ◽  
Author(s):  
Richard Payling ◽  
Patrick Chapon ◽  
Olivier Bonnot ◽  
Philippe Belenguer ◽  
Philippe Guillot ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

scholarly journals Optical Emission Spectra of Oxygen Plasma Produced by Radio-Frequency Plasma

2009 ◽  
Vol 18 (2) ◽  
pp. 102-107
Author(s):  
Do-Yeob Kim ◽  
Min-Su Kim ◽  
Tae-Hoon Kim ◽  
Ghun-Sik Kim ◽  
Hyun-Young Choi ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Oxygen Plasma ◽  
Emission Spectra ◽  
Optical Emission ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Optical Emission Spectra
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