ESR and X-ray diffraction studies of the CVD diamond films

1997 ◽  
Vol 12 (1) ◽  
pp. 53-59 ◽  
Author(s):  
K. Fabisiak ◽  
F. Rozpłoch
1998 ◽  
Vol 57 (22) ◽  
pp. 14123-14132 ◽  
Author(s):  
L. Fayette ◽  
B. Marcus ◽  
M. Mermoux ◽  
G. Tourillon ◽  
K. Laffon ◽  
...  

1997 ◽  
Vol 505 ◽  
Author(s):  
S. Nijhawan ◽  
J. Rankin ◽  
B. L Walden ◽  
B. W. Sheldon

ABSTRACTIntrinsic stresses in polycrystalline CVD diamond films have been related to restructuring at grain boundaries. It is speculated that reducing the interfacial energy induces an elastic tensile strain. There appears to be a correlation between the evolution of macroscopic stresses in the entire sample and localized, non-homogeneous stresses in the microstructure based on Raman Spectroscopy and x-ray diffraction pole figures. A multistep processing sequence developed previously can help reduce these stresses substantially, by using an intermediate annealing step when the diamond grains are partially coalesced. Our results suggest that small changes in the film microstructure due to annealing can reduce both homogeneous and non-homogeneous stresses.


2016 ◽  
Vol 61 (6) ◽  
pp. 979-986 ◽  
Author(s):  
I. A. Prokhorov ◽  
A. E. Voloshin ◽  
V. G. Ralchenko ◽  
A. P. Bolshakov ◽  
D. A. Romanov ◽  
...  

2001 ◽  
Vol 10 (3-7) ◽  
pp. 750-754 ◽  
Author(s):  
N.G. Ferreira ◽  
E. Abramof ◽  
E.J. Corat ◽  
N.F. Leite ◽  
V.J. Trava-Airoldi

2000 ◽  
Vol 288 (2) ◽  
pp. 217-222 ◽  
Author(s):  
O Durand ◽  
R Bisaro ◽  
C.J Brierley ◽  
P Galtier ◽  
G.R Kennedy ◽  
...  

Crystals ◽  
2019 ◽  
Vol 9 (8) ◽  
pp. 396 ◽  
Author(s):  
Stanislav Stoupin ◽  
Thomas Krawczyk ◽  
Zunping Liu ◽  
Carl Franck

A set of 20 single crystal diamond plates synthesized using chemical vapor deposition (CVD) was studied using X-ray diffraction imaging to determine their applicability as side-bounce (single-reflection) Laue monochromators for synchrotron radiation. The crystal plates were of optical grade (as provided by the supplier) with (001) nominal surface orientation. High dislocation density was found for all samples. Distortions in the crystal lattice were quantified for low-index Laue reflections of interests using rocking curve topography. Maps of effective radius of curvature in the scattering plane were calculated using spline interpolation of the rocking curve peak position across the studied plates. For several selected plates, nearly flat regions with large effective radius of curvature were found ( R 0 ≳ 30 - 70 m, some regions as large as 1 × 4 mm 2 ). The average width of the rocking curve for these regions was found to be about 150 μ rad (r.m.s.). These observations suggest that the selected CVD diamond plates could be used as intermediate-bandwidth monochromators refocusing the radiation source to a specific location downstream with close to 1:1 distance ratio.


1999 ◽  
Vol 594 ◽  
Author(s):  
S. Gupta ◽  
G. Morell ◽  
R. S. Katiyar ◽  
D. R. Gilbert ◽  
R. K. Singh

AbstractWe have studied diamond films grown by electron cyclotron resonance-assisted chemical vapor deposition (ECR-CVD) at low pressure (1.0 Torr) and temperatures (550–700 °C). These films were grown on seeded Si (111) substrates with different diamond seed densities (0.225, 1.5, 2.3, and 3.1 × 109 nuclei/cm2). Scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy (RS) were employed to investigate the crystalline quality, diamond yield, and stresses developed in the films as a function of seeding density. Thermal interfacial stress, interactions across grain boundaries, and internal stress were considered in order to account for the total stress observed from the Raman band. We present correlations among seed density, relative amount of non-sp3 phase, O/C ratio, and total intrinsic stress.


2013 ◽  
Vol 544 ◽  
pp. 234-237
Author(s):  
Mei Ai Lin ◽  
Lin Jun Wang ◽  
Jian Huang ◽  
Ke Tang ◽  
Bing Ren ◽  
...  

Li-doped zinc oxide (ZnO) films were deposited on nucleation side of freestanding diamond (FSD) films by the radio frequency magnetron sputtering method. The effect of oxygen partial pressure on structural, optical and electrical properties of the ZnO films was investigated by X-ray diffraction (XRD) Raman spectroscopy, semiconductor characterization system and Hall effect measurement system. The results showed that the introduction of oxygen as a reactive gas was helpful to improve the crystalline quality of Li-doped ZnO films.


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