Effect of pressure on the growth of the crystallites of low pressure chemical vapour deposited polycrystalline silicon films and the effective electron mobility under high normal field in thin film transistors

1994 ◽  
Vol 74 (1-2) ◽  
pp. 155-160
Author(s):  
C. A. Dimitriadis ◽  
J. Stoemenos ◽  
P. A. Coxon ◽  
S. Friligkos ◽  
J. Antonopoulos ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Mobility ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Chemical Vapour ◽  
Effective Electron ◽  
Effect Of Pressure ◽  
Normal Field ◽  
Pressure Chemical ◽  
Polycrystalline Silicon Films

High‐performance thin‐film transistors from optimized polycrystalline silicon films

1987 ◽  
Vol 50 (26) ◽  
pp. 1894-1896 ◽  
Author(s):  
D. B. Meakin ◽  
P. A. Coxon ◽  
P. Migliorato ◽  
J. Stoemenos ◽  
N. A. Economou
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
High Performance ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

Thin-Film Transistors with Polycrystalline Silicon Films Prepared by Two-Step Rapid Thermal Annealing

2000 ◽  
Vol 39 (Part 2, No. 1A/B) ◽  
pp. L19-L21 ◽  
Author(s):  
Huang-Chung Cheng ◽  
Chun-Yao Huang ◽  
Fang-Shing Wang ◽  
Kuen-Hsien Lin ◽  
Fu-Gow Tarntair
Keyword(s):  
Thin Film ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

Solution-based metal induced crystallized polycrystalline silicon films and thin-film transistors

2007 ◽  
Vol 18 (S1) ◽  
pp. 117-121 ◽  
Author(s):  
Shuyun Zhao ◽  
Zhiguo Meng ◽  
Chunya Wu ◽  
Shaozhen Xiong ◽  
Man Wong ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films
Sign in / Sign up

Export Citation Format

Share Document