Experimental studies of N+ implantation into CVD diamond thin films

1997 ◽  
Vol 40 (4) ◽  
pp. 361-368 ◽  
Author(s):  
Huoping Xin ◽  
Chenglu Lin ◽  
Jianxin Wang ◽  
Shichang Zou ◽  
Xiaohong Shi ◽  
...  
Keyword(s):  
Thin Films ◽  
Experimental Studies ◽  
Cvd Diamond ◽  
Diamond Thin Films

scholarly journals Thermal Characterization of Polycrystalline CVD Diamond Thin Films

2009 ◽  
Vol 1 (1) ◽  
pp. 609-613 ◽  
Author(s):  
S. Lani ◽  
C. Ataman ◽  
W. Noell ◽  
D. Briand ◽  
N. de Rooij
Keyword(s):  
Thin Films ◽  
Thermal Characterization ◽  
Cvd Diamond ◽  
Diamond Thin Films

Measuring the Adhesion of Diamond Thin Films to Substrates Using the Blister Test

1995 ◽  
Vol 383 ◽  
Author(s):  
Jim Sizemore ◽  
R. J. Hohlfelder ◽  
J. J. Vlassak ◽  
W. D. Nix
Keyword(s):  
Thin Films ◽  
Test Data ◽  
Diamond Films ◽  
Cvd Diamond ◽  
Simple Equation ◽  
Testing Technique ◽  
Blister Test ◽  
Plasma Enhanced Cvd ◽  
Si Substrates ◽  
Diamond Thin Films

ABSTRACTIt is shown that the blister testing technique can be used to measure the adhesion of thin films to their substrates. A brief discussion of blister test mechanics is presented here, leading to a simple equation relating adhesion to the height of the blister and the pressure causing it to grow. Blister test data for plasma-enhanced CVD diamond films on Si substrates have been analyzed using this relation. The tests show adhesion energies of 1.8– 2.6 J/m2.

Microstructure evolution and non-diamond carbon incorporation in CVD diamond thin films grown at low substrate temperatures

1997 ◽  
Vol 172 (3-4) ◽  
pp. 404-415 ◽  
Author(s):  
J. Michler ◽  
J. Stiegler ◽  
Y. von Kaenel ◽  
P. Moeckli ◽  
W. Dorsch ◽  
...  
Keyword(s):  
Thin Films ◽  
Microstructure Evolution ◽  
Cvd Diamond ◽  
Carbon Incorporation ◽  
Diamond Thin Films ◽  
Substrate Temperatures

Growth of (100) oriented diamond thin films on ball structure diamond-like particles

1992 ◽  
Vol 7 (7) ◽  
pp. 1606-1609 ◽  
Author(s):  
Lee Chow ◽  
Alan Horner ◽  
Hooman Sakouri ◽  
Bahram Roughani ◽  
Swaminatha Sundaram
Keyword(s):  
Thin Films ◽  
Substrate Temperature ◽  
Diamond Films ◽  
Cvd Diamond ◽  
X Ray ◽  
Oriented Films ◽  
Diamond Thin Films

The morphology of typical CVD diamond thin films has been shown to be controlled by the concentration of methane during deposition. For example, for CH4 concentrations c < 0.4% the (111) faces dominate, while at 0.4% < c < 1.2% (100) faces dominate. Here we showed that the (100) oriented diamond films can be grown on top of the microcrystalline ball-like particles under suitable conditions. These (100) oriented diamond films are grown under the condition of 1.5% methane in hydrogen, substrate temperature of 680 °C–750 °C, and pressure of 30–80 Torr. The bombardment of the diamond thin films by ions in the plasma is believed to be an important factor for the formation of (100) oriented films on top of the ball-like particles. SEM, Raman, and x-ray techniques were used to characterize the deposited (100) oriented diamond thin films.

Structure modelling of  3 and  9 coincident boundaries in CVD diamond thin films

1999 ◽  
Vol 48 (3) ◽  
pp. 245-251 ◽  
Author(s):  
Y. Zhang ◽  
H. Ichinose ◽  
m. nakanose ◽  
K. Ito ◽  
Y. Ishida
Keyword(s):  
Thin Films ◽  
Cvd Diamond ◽  
Diamond Thin Films

Characterization of soft-X-ray detectors fabricated with high-quality CVD diamond thin films

2008 ◽  
Vol 254 (19) ◽  
pp. 6277-6280 ◽  
Author(s):  
Y. Iwakaji ◽  
M. Kanasugi ◽  
O. Maida ◽  
Y. Takeda ◽  
Y. Saitoh ◽  
...  
Keyword(s):  
Thin Films ◽  
Cvd Diamond ◽  
High Quality ◽  
X Ray ◽  
Diamond Thin Films
Sign in / Sign up

Export Citation Format

Share Document