Electrical and structural characterization of GaAs vertical-sidewall epilayers grown by atomic layer epitaxy

1992 ◽  
Vol 21 (1) ◽  
pp. 109-114 ◽  
Author(s):  
D. B. Gladden ◽  
W. D. Goodhue ◽  
C. A. Wang ◽  
G. A. Lincoln
Keyword(s):  
Structural Characterization ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Vertical Sidewall

Atomic layer epitaxy and structural characterization of InP and InAs/InP heterostructures

1994 ◽  
Vol 75 (5) ◽  
pp. 2398-2405 ◽  
Author(s):  
C. A. Tran ◽  
R. A. Masut ◽  
J. L. Brebner ◽  
M. Jouanne
Keyword(s):  
Structural Characterization ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy

scholarly journals Luminescent properties of europium titanium phosphate thin films deposited by atomic layer deposition

RSC Advances ◽  
2017 ◽  
Vol 7 (13) ◽  
pp. 8051-8059 ◽  
Author(s):  
Michael N. Getz ◽  
Per-Anders Hansen ◽  
Helmer Fjellvåg ◽  
Ola Nilsen
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Structural Characterization ◽  
Atomic Layer ◽  
Luminescent Properties ◽  
Titanium Phosphate ◽  
The Novel ◽  
Layer Deposition ◽  
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Optical and structural characterization of luminescent thin films of the novel material europium titanium phosphate, deposited by atomic layer deposition.

Atomic layer epitaxy and characterization of InP and InAs/InP heterostructures

1994 ◽  
Vol 145 (1-4) ◽  
pp. 332-337 ◽  
Author(s):  
C.A. Tran ◽  
R.A. Masut ◽  
J.L. Brebner ◽  
M. Jouanne ◽  
L. Salamanca-Riba ◽  
...  
Keyword(s):  
Atomic Layer ◽  
Atomic Layer Epitaxy

Growth and characterization of III-N ternary thin films by plasma assisted atomic layer epitaxy at low temperatures

2015 ◽  
Vol 589 ◽  
pp. 47-51 ◽  
Author(s):  
Neeraj Nepal ◽  
Virginia R. Anderson ◽  
Jennifer K. Hite ◽  
Charles R. Eddy
Keyword(s):  
Thin Films ◽  
Low Temperatures ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy
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