Electrical characterization of very-low energy (0-30 eV) CI-Radical/Ion-beam-etching induced damage using two-dimensional electron gas heterostructures
1991 ◽
Vol 30
(Part 1, No. 11B)
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pp. 3261-3265
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1994 ◽
Vol 145
(1-4)
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pp. 953-957
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2007 ◽
Vol 21
(08n09)
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pp. 1541-1548
1996 ◽
Vol 35
(Part 1, No. 12B)
◽
pp. 6652-6658
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