Electron microscopy and energy loss study of low temperature plasma deposited oxide on a CZ grown Si substrate

1993 ◽  
Vol 22 (1) ◽  
pp. 93-97 ◽  
Author(s):  
G. L. Waytena
Keyword(s):  
Electron Microscopy ◽  
Low Temperature ◽  
Energy Loss ◽  
Low Temperature Plasma ◽  
Si Substrate ◽  
Temperature Plasma

scholarly journals The Transformation of Di- and Tri-chloromethane Induced By Low Voltage Discharge

2020 ◽  
Author(s):  
Bodrikov Ivan Vasilievich ◽  
Grinvald Iosif Isaevich ◽  
Titov Evgeniy Yuryevich ◽  
Titov Evgeniy Yuryevich ◽  
Razov Evgeniy Nikolaevich
Keyword(s):  
Electron Microscopy ◽  
Liquid Phase ◽  
Low Temperature ◽  
Gas Phase ◽  
Low Voltage ◽  
Current Source ◽  
Low Temperature Plasma ◽  
Plasma Discharges ◽  
Temperature Plasma ◽  
Molecular Systems

This article is focused on the transformation of di- and trichloromethane by induced low-voltage discharges in the liquid phase. To generate discharges, a direct current source is used (capacitance 2200 μF, voltage 60 V). The products and probable intermediates of the CH2Cl2 and CHCl3 transformation were determined by the methods of thermodynamic modeling, FTIR spectroscopy and electron microscopy. Under the action of low-voltage discharges on the liquid substrates, needle fullerene- like structures are formed. In this case the gas phase consists mainly of hydrogen chloride. From the simulation of the nonequilibrium composition of particles and molecular systems it follows that in the course of induced reactions of CH2Cl2 and CHCl3 and geminal elimination of HCl molecules, predominantly carbene-type intermediates are generated. Keywords: dichloromethane, trichloromethane, low temperature plasma, discharges in the liquid phase

scholarly journals Low temperature plasma enhanced deposition of GaP films on Si substrate

2018 ◽  
Vol 36 (2) ◽  
pp. 021302 ◽  
Author(s):  
Alexander S. Gudovskikh ◽  
Ivan A. Morozov ◽  
Alexander V. Uvarov ◽  
Dmitriy A. Kudryashov ◽  
Ekaterina V. Nikitina ◽  
...  
Keyword(s):  
Low Temperature ◽  
Low Temperature Plasma ◽  
Si Substrate ◽  
Temperature Plasma
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