Electron energy‐loss spectroscopy analysis of low‐temperature plasma‐enhanced chemically vapor deposited a‐C:H films

1989 ◽  
Vol 7 (3) ◽  
pp. 1350-1352 ◽  
Author(s):  
A. J. Nelson ◽  
D. K. Benson ◽  
C. E. Tracy ◽  
L. L. Kazmerski ◽  
J. F. Wager
Micron ◽  
2016 ◽  
Vol 84 ◽  
pp. 37-42 ◽  
Author(s):  
Gabriele M. Ilari ◽  
Vipin Chawla ◽  
Santhosh Matam ◽  
Yucheng Zhang ◽  
Johann Michler ◽  
...  

2004 ◽  
Vol 84 (18) ◽  
pp. 3672-3674 ◽  
Author(s):  
Nobuyuki Ikarashi ◽  
Makoto Miyamura ◽  
Koji Masuzaki ◽  
Toru Tatsumi

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