Integrated in situ monitoring of a metalorganic vapor phase epitaxy reactor for II–VI epitaxy

1994 ◽  
Vol 23 (2) ◽  
pp. 167-173 ◽  
Author(s):  
S. J. C. Irvine ◽  
J. Bajaj ◽  
R. V. Gil
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
In Situ Monitoring

In-situ monitoring of In0.5Ga0.5As quantum dot formation during metalorganic vapor phase epitaxy by fast-nulling ellipsometry

1999 ◽  
Vol 141 (1-2) ◽  
pp. 114-118 ◽  
Author(s):  
Jeong-Sik Lee ◽  
Shigeo Sugou ◽  
Hong-Wen Ren ◽  
Yasuaki Masumoto ◽  
Kaori Kurihara
Keyword(s):  
Quantum Dot ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
In Situ Monitoring

Continuous in situ X-ray reflectivity investigation on epitaxial growth of InGaN by metalorganic vapor phase epitaxy

2014 ◽  
Vol 407 ◽  
pp. 68-73 ◽  
Author(s):  
Guangxu Ju ◽  
Shingo Fuchi ◽  
Masao Tabuchi ◽  
Hiroshi Amano ◽  
Yoshikazu Takeda
Keyword(s):  
Epitaxial Growth ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
X Ray

In situ optical monitoring of metalorganic vapor phase epitaxy growth of C-doped GaAs

1999 ◽  
Vol 68 (3) ◽  
pp. 349-352 ◽  
Author(s):  
A. Rebey ◽  
B. El Jani ◽  
A. Leycuras ◽  
S. Laugt ◽  
P. Gibart
Keyword(s):  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Optical Monitoring
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