In situ optical monitoring of metalorganic vapor phase epitaxy growth of C-doped GaAs

A. Rebey; B. El Jani; A. Leycuras; S. Laugt; P. Gibart

doi:10.1007/s003390050901

In situ optical monitoring of metalorganic vapor phase epitaxy growth of C-doped GaAs

Applied Physics A ◽

10.1007/s003390050901 ◽

1999 ◽

Vol 68 (3) ◽

pp. 349-352 ◽

Cited By ~ 7

Author(s):

A. Rebey ◽

B. El Jani ◽

A. Leycuras ◽

S. Laugt ◽

P. Gibart

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Optical Monitoring

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Novel in situ optical monitoring method for selective area metalorganic vapor phase epitaxy

Journal of Crystal Growth ◽

10.1016/0022-0248(96)00287-4 ◽

1996 ◽

Vol 167 (3-4) ◽

pp. 434-439 ◽

Cited By ~ 3

Author(s):

Yasuhiko Ishikawa ◽

Kazuaki Nakakoshi ◽

Takashi Fukui

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Optical Monitoring ◽

Monitoring Method ◽

Selective Area

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Observation of a new in-situ optical monitoring signal with monolayer resolution in metalorganic molecular beam epitaxy and metalorganic vapor phase epitaxy of wide-gap II–VI compounds

Journal of Crystal Growth ◽

10.1016/0022-0248(94)91030-8 ◽

1994 ◽

Vol 145 (1-4) ◽

pp. 68-73 ◽

Cited By ~ 4

Author(s):

Akihiko Yoshikawa ◽

Masakazu Kobayashi ◽

Shigeru Tokita

Keyword(s):

Molecular Beam Epitaxy ◽

Vapor Phase ◽

Molecular Beam ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Optical Monitoring ◽

Metalorganic Molecular Beam Epitaxy ◽

Wide Gap

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Corrigendum to: Continuous in situ X-ray reflectivity investigation on epitaxial growth of InGaN by metalorganic vapor phase epitaxy [J. Cryst. Growth 407 (2014) 68–73]

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2015.02.088 ◽

2015 ◽

Vol 418 ◽

pp. 185

Author(s):

Guangxu Ju ◽

Shingo Fuchi ◽

Masao Tabuchi ◽

Hiroshi Amanoa ◽

Yoshikazu Takeda

Keyword(s):

Epitaxial Growth ◽

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

X Ray

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Continuous in situ X-ray reflectivity investigation on epitaxial growth of InGaN by metalorganic vapor phase epitaxy

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2014.08.023 ◽

2014 ◽

Vol 407 ◽

pp. 68-73 ◽

Cited By ~ 6

Author(s):

Guangxu Ju ◽

Shingo Fuchi ◽

Masao Tabuchi ◽

Hiroshi Amano ◽

Yoshikazu Takeda

Keyword(s):

Epitaxial Growth ◽

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

X Ray

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In situ monitoring of ZnS/GaP and ZnSe/GaAs metalorganic vapor phase epitaxy using reflectance anisotropy spectroscopy and spectroscopic ellipsometry

Thin Solid Films ◽

10.1016/s0040-6090(99)00896-2 ◽

2000 ◽

Vol 364 (1-2) ◽

pp. 12-15 ◽

Cited By ~ 6

Author(s):

C Meyne ◽

M Gensch ◽

S Peters ◽

U.W Pohl ◽

J.-T Zettler ◽

...

Keyword(s):

Vapor Phase ◽

Spectroscopic Ellipsometry ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

In Situ Monitoring ◽

Reflectance Anisotropy

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In-situ monitoring and control of surface processes in metalorganic vapor phase epitaxy by surface photo-absorption

Journal of Crystal Growth ◽

10.1016/0022-0248(94)91021-9 ◽

1994 ◽

Vol 145 (1-4) ◽

pp. 1-11 ◽

Cited By ~ 34

Author(s):

Naoki Kobayashi

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

In Situ Monitoring ◽

Surface Processes ◽

Monitoring And Control ◽

And Control

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Integrated in situ monitoring of a metalorganic vapor phase epitaxy reactor for II–VI epitaxy

Journal of Electronic Materials ◽

10.1007/bf02655264 ◽

1994 ◽

Vol 23 (2) ◽

pp. 167-173 ◽

Cited By ~ 9

Author(s):

S. J. C. Irvine ◽

J. Bajaj ◽

R. V. Gil

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

In Situ Monitoring

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In-situ optical monitoring of surface morphology and stoichiometry during GaN metal organic vapor phase epitaxy

Applied Surface Science ◽

10.1016/s0169-4332(00)00116-1 ◽

2000 ◽

Vol 159-160 ◽

pp. 398-404 ◽

Cited By ~ 7

Author(s):

Naoki Kobayashi ◽

Yasuyuki Kobayashi

Keyword(s):

Surface Morphology ◽

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Optical Monitoring ◽

Organic Vapor ◽

Metal Organic

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Fabrication of AlxGa1-xAs buried heterostructure laser diodes by in-situ gas etching and selective-area metalorganic vapor phase epitaxy

Journal of Crystal Growth ◽

10.1016/0022-0248(94)91157-6 ◽

1994 ◽

Vol 145 (1-4) ◽

pp. 881-885 ◽

Cited By ~ 8

Author(s):

Y. Inoue ◽

K. Shimoyama ◽

K. Fujii ◽

N. Hosoi ◽

H. Gotoh

Keyword(s):

Vapor Phase ◽

Laser Diodes ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy ◽

Selective Area ◽

Heterostructure Laser ◽

Buried Heterostructure

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In situ reflectance monitoring of InP/InGaAsP films grown by metalorganic vapor phase epitaxy

Applied Physics Letters ◽

10.1063/1.116946 ◽

1996 ◽

Vol 69 (7) ◽

pp. 928-930 ◽

Cited By ~ 11

Author(s):

R. M. Lum ◽

M. L. McDonald ◽

J. C. Bean ◽

J. Vandenberg ◽

T. L. Pernell ◽

...

Keyword(s):

Vapor Phase ◽

Metalorganic Vapor Phase Epitaxy ◽

Vapor Phase Epitaxy

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