The effects of ion implantation and pulsed electron beam anneal on Ge films grown epitaxially on ◃100▹ GaAs

1980 ◽  
Vol 9 (3) ◽  
pp. 685-692 ◽  
Author(s):  
W. Tseng ◽  
H. Dietrich ◽  
J. Davey ◽  
A. Christou ◽  
W. T. Anderson
Keyword(s):  
Electron Beam ◽  
Ion Implantation ◽  
Pulsed Electron Beam

Pulsed‐electron‐beam annealing of ion‐implantation damage

1979 ◽  
Vol 50 (2) ◽  
pp. 783-787 ◽  
Author(s):  
A. C. Greenwald ◽  
A. R. Kirkpatrick ◽  
R. G. Little ◽  
J. A. Minnucci
Keyword(s):  
Electron Beam ◽  
Ion Implantation ◽  
Pulsed Electron Beam ◽  
Implantation Damage

Analysis of Desorbed Gases from Oxygen-free Copper Stimulated by Irradiation with Single Pulsed Electron Beam

2012 ◽  
Vol 132 (11) ◽  
pp. 951-957
Author(s):  
Hiroki Kaneko ◽  
Yasushi Yamano ◽  
Shinichi Kobayashi ◽  
Yoshio Saito
Keyword(s):  
Electron Beam ◽  
Pulsed Electron Beam
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