Laser interferometer with a high-resolution optical microscope for measuring small line scales
1996 ◽
Vol 54
◽
pp. 940-941
Keyword(s):
1990 ◽
Vol 48
(1)
◽
pp. 60-61
Keyword(s):
1992 ◽
Vol 87
(5-6)
◽
pp. 212-218
◽
1994 ◽
Vol 235-240
◽
pp. 2699-2700
◽
2000 ◽
Vol 39
(Part 1, No. 6A)
◽
pp. 3599-3602
◽