Determination of Young's modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining process
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2019 ◽
Vol 58
(SH)
◽
pp. SHHG01
◽
Keyword(s):
Keyword(s):
2004 ◽
Vol 15
(12)
◽
pp. 2389-2394
◽