Simultaneous Determination of Young’s Modulus and Residual Stress in PECVD a-SiC from Postbuckling Vibration of MEMS Beams
2019 ◽
Vol 58
(SH)
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pp. SHHG01
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Keyword(s):
1965 ◽
Vol 36
(12)
◽
pp. 1719-1721
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2009 ◽
Vol 19
(12)
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pp. 125027
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Keyword(s):
Keyword(s):
Keyword(s):
2011 ◽
Vol 25
(12)
◽
pp. 3165-3171
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