Hydrogen profile analysis in a-C:H films by elastic recoil detection (ERD)

1989 ◽  
Vol 333 (4-5) ◽  
pp. 326-328 ◽  
Author(s):  
K. Schmidt ◽  
K. Reichelt ◽  
B. Stritzker ◽  
J. Zou
Keyword(s):  
Profile Analysis ◽  
Elastic Recoil ◽  
Elastic Recoil Detection

Single Source CVD of LiAlO2

1997 ◽  
Vol 495 ◽  
Author(s):  
Wonyong Koh ◽  
Su-Jin Ku ◽  
Yunsoo Kim
Keyword(s):  
Photoelectron Spectroscopy ◽  
Profile Analysis ◽  
Chemical Vapor ◽  
Single Source ◽  
Elastic Recoil ◽  
Elastic Recoil Detection ◽  
Si Substrates ◽  
Metal Contents ◽  
Deposited Film ◽  
Heterometallic Compound

ABSTRACTWe successfully deposited LiAlO2 films on Si substrates at 400–600 °C by single source chemical vapor deposition using a heterometallic compound, Li(O'Pr)2Al(CH3)2, which contains Li, Al, and O at the same 1:1:2 ratio as LiAlO2. Li(O'Pr)2Al(CH3)2 is sufficiently volatile to be vapor-transported at 50 °C. Elastic recoil detection and Rutherford backscattering spectroscopy analyses of a deposited film indicate that the film is stoichiometric (Li:Al:O = 1.0:1.0:2.0) and contains a few atomic percent hydrogen (5 %) and carbon (2 %). Depth profile analysis of X-ray photoelectron spectroscopy also confirms the 1:1 ratio of metal contents in the films. As-deposited films were amorphous, however, crystallized to β- or γ-LiA1O2 after annealing at 950 °C.

Depth profile analysis with monolayer resolution using elastic recoil detection (ERD)

1998 ◽  
Vol 42 (1) ◽  
pp. 25-30 ◽  
Author(s):  
G Dollinger ◽  
C. M Frey ◽  
A Bergmaier ◽  
T Faestermann
Keyword(s):  
Depth Profile ◽  
Profile Analysis ◽  
Elastic Recoil ◽  
Depth Profile Analysis ◽  
Elastic Recoil Detection

Yttrium Oxyhydrides for Photochromic Applications: Correlating Composition and Optical Response

2018 ◽  
Author(s):  
Dmitrii Moldarev ◽  
Elbruz M. Baba ◽  
Marcos V. Moro ◽  
Chang C. You ◽  
Smagul Zh. Karazhanov ◽  
...  
Keyword(s):  
Medical Devices ◽  
Ternary Diagram ◽  
Optical And Electrical Properties ◽  
Ambient Conditions ◽  
Elastic Recoil ◽  
Elastic Recoil Detection Analysis ◽  
Photochromic Properties ◽  
Smart Windows ◽  
Elastic Recoil Detection ◽  
Detection Analysis

It has been recently demonstrated that yttrium oxyhydride(YHO) films can exhibit reversible photochromic properties when exposed to illumination at ambient conditions. This switchable optical propertyenables their utilization in many technological applications, such as smart windows, sensors, goggles, medical devices, etc. However, how the composition of the films affects their optical properties is not fully clear and therefore demands a straightforward investigation. In this work, the composition of YHO films manufactured by reactive magnetron sputtering under different conditions is deduced in a ternary diagram from Time-of-Flight Elastic Recoil Detection Analysis (ToF-ERDA). The results suggest that stable compounds are formed with a specificchemical formula – YH<sub>2-δ</sub>O<sub>δ</sub>. In addition, optical and electrical properties of the films are investigated, and a correlation with their compositions is established. The corresponding photochromic response is found in a specific oxygen concentration range (0.45 < δ < 1.5) with maximum and minimum of magnitude on the lower and higher border, respectively.

Study of the rapid thermal nitridation and silicidation of Ti using elastic recoil detection. I. Ti on Si

1988 ◽  
Vol 63 (10) ◽  
pp. 5104-5109 ◽  
Author(s):  
G. J. P. Krooshof ◽  
F. H. P. M. Habraken ◽  
W. F. van der Weg ◽  
L. Van den hove ◽  
K. Maex ◽  
...  
Keyword(s):  
Elastic Recoil ◽  
Elastic Recoil Detection ◽  
Thermal Nitridation
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