Depth profile analysis of helium in silicon with high-resolution elastic recoil detection analysis

Mitsuhiro Tomita; Haruko Akutsu; Yasunori Oshima; Nobutaka Sato; Shoichi Mure; Hirofumi Fukuyama; Chikara Ichihara

doi:10.1116/1.3425636

Depth profile analysis of helium in silicon with high-resolution elastic recoil detection analysis

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3425636 ◽

2010 ◽

Vol 28 (3) ◽

pp. 554-557 ◽

Cited By ~ 1

Author(s):

Mitsuhiro Tomita ◽

Haruko Akutsu ◽

Yasunori Oshima ◽

Nobutaka Sato ◽

Shoichi Mure ◽

...

Keyword(s):

High Resolution ◽

Depth Profile ◽

Profile Analysis ◽

Elastic Recoil ◽

Depth Profile Analysis ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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High resolution depth profile analysis by elastic recoil detection with heavy ions

Analytical and Bioanalytical Chemistry ◽

10.1007/s0021653530311 ◽

1995 ◽

Vol 353 (3-4) ◽

pp. 311-315 ◽

Cited By ~ 1

Author(s):

G. Dollinger ◽

A. Bergmaier ◽

T. Faestermann ◽

C. M. Frey

Keyword(s):

High Resolution ◽

Depth Profile ◽

Heavy Ions ◽

Profile Analysis ◽

Elastic Recoil ◽

Depth Profile Analysis ◽

Elastic Recoil Detection

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High resolution depth profile analysis by elastic recoil detection with heavy ions

Fresenius Journal of Analytical Chemistry ◽

10.1007/bf00322058 ◽

1995 ◽

Vol 353 (3-4) ◽

pp. 311-315 ◽

Cited By ~ 22

Author(s):

G. Dollinger ◽

A. Bergmaier ◽

T. Faestermann ◽

C. M. Frey

Keyword(s):

High Resolution ◽

Depth Profile ◽

Heavy Ions ◽

Profile Analysis ◽

Elastic Recoil ◽

Depth Profile Analysis ◽

Elastic Recoil Detection

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Hydrogen depth profile determination of materials by elastic recoil detection analysis

10.1063/1.5119490 ◽

2019 ◽

Author(s):

Róbert Riedlmajer ◽

Dušan Vaňa ◽

Marián Hazlinger

Keyword(s):

Depth Profile ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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High resolution elastic recoil detection analysis of polystyrene depth profiles using carbon ions

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(98)00344-9 ◽

1998 ◽

Vol 143 (3) ◽

pp. 371-380 ◽

Cited By ~ 9

Author(s):

Mark Geoghegan ◽

François Abel

Keyword(s):

High Resolution ◽

Carbon Ions ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Depth Profiles ◽

Detection Analysis

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Characterization of subsurface hydrogen in diamond films by high-resolution elastic recoil detection analysis

Physica B Condensed Matter ◽

10.1016/j.physb.2005.12.079 ◽

2006 ◽

Vol 376-377 ◽

pp. 307-310 ◽

Cited By ~ 4

Author(s):

Kazushi Hayashi ◽

Nobuyuki Kawakami ◽

Chikara Ichihara ◽

Koji Kobashi

Keyword(s):

High Resolution ◽

Diamond Films ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Quantification of outermost OH group on silica glass surface by high-resolution elastic recoil detection analysis

Journal of Non-Crystalline Solids ◽

10.1016/j.jnoncrysol.2018.07.031 ◽

2018 ◽

Vol 499 ◽

pp. 408-411 ◽

Cited By ~ 2

Author(s):

Yuichi Yamamoto ◽

Koya Sato ◽

Kaoru Nakajima ◽

Kenji Kimura

Keyword(s):

High Resolution ◽

Silica Glass ◽

Glass Surface ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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High Resolution Elastic Recoil Detection Analysis with Q3D Magnetic Spectrometer

Chinese Physics Letters ◽

10.1088/0256-307x/16/7/009 ◽

1999 ◽

Vol 16 (7) ◽

pp. 493-495 ◽

Cited By ~ 1

Author(s):

Xiu-qin Lu ◽

Chang-bo Fu ◽

Gang Liang ◽

Ji-yu Guo ◽

Kui Zhao ◽

...

Keyword(s):

High Resolution ◽

Magnetic Spectrometer ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Depth Profiling of Boron in Silicon by High-resolution Medium Energy Elastic Recoil Detection Analysis

e-Journal of Surface Science and Nanotechnology ◽

10.1380/ejssnt.2012.655 ◽

2012 ◽

Vol 10 (0) ◽

pp. 655-660 ◽

Cited By ~ 1

Author(s):

Kaoru Sasakawa ◽

Kaoru Nakajima ◽

Motofumi Suzuki ◽

Kenji Kimura

Keyword(s):

High Resolution ◽

Depth Profiling ◽

Medium Energy ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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High-Resolution Elastic Recoil Detection Analysis

Compendium of Surface and Interface Analysis ◽

10.1007/978-981-10-6156-1_40 ◽

2018 ◽

pp. 247-251

Author(s):

Kaoru Nakajima

Keyword(s):

High Resolution ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Focusing in high-resolution time-of-flight elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(95)01485-3 ◽

1996 ◽

Vol 118 (1-4) ◽

pp. 588-592

Author(s):

A.J.H. Mass ◽

S.S. Klein ◽

F.P. Rademakers ◽

A.W.E. Minnaert ◽

M.J.A. de Voigt

Keyword(s):

High Resolution ◽

Time Of Flight ◽

Elastic Recoil ◽

Resolution Time ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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