Synthesis of crystalline polyimide film by ionized cluster-beam deposition

1993 ◽  
Vol 28 (6) ◽  
pp. 1537-1541 ◽  
Author(s):  
K. W. Kim ◽  
S. C. Choi ◽  
S. S. Kim ◽  
S. J. Cho ◽  
C. N. Whang ◽  
...  
Keyword(s):  
Polyimide Film ◽  
Cluster Beam ◽  
Cluster Beam Deposition ◽  
Beam Deposition

Crystalline Polyimide Thin Film Deposition by Ionized Cluster Bean

1989 ◽  
Vol 157 ◽  
Author(s):  
S.J. Cho ◽  
H.S. Choe ◽  
H.G. Jang ◽  
S.S. Iim ◽  
C.N. Whang
Keyword(s):  
Crystal Orientation ◽  
Thin Film Deposition ◽  
Polyimide Film ◽  
Film Deposition ◽  
Ion Acceleration ◽  
Cluster Beam ◽  
Cluster Beam Deposition ◽  
Acceleration Voltage ◽  
Preferential Crystal Orientation ◽  
Beam Deposition

ABSTRACTPolyimide thin films are deposited by the ionized cluster beam deposition( ICBD ) technique. Polymerization and crystallization of polyimide were investigated using TEN, IR, and the electronic structure of the polyimide film was investigated using XPS. Films deposited at optimum ion acceleration voltage showed strong preferential crystal orientation. Crystalline polyimide film was obtained at ion acceleration voltage of 700 V.

Mass selection of neutral clusters in Low‐Energy Cluster Beam Deposition experiments: Is it realistic?

1994 ◽  
Vol 64 (10) ◽  
pp. 1212-1214 ◽  
Author(s):  
J. F. Roux ◽  
B. Cabaud ◽  
G. Fuchs ◽  
D. Guillot ◽  
A. Hoareau ◽  
...  
Keyword(s):  
Low Energy ◽  
Mass Selection ◽  
Cluster Beam ◽  
Cluster Beam Deposition ◽  
Energy Cluster ◽  
Selection Of ◽  
Beam Deposition

scholarly journals Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8

2011 ◽  
Vol 21 (4) ◽  
pp. 045013 ◽  
Author(s):  
Mattia Marelli ◽  
Giorgio Divitini ◽  
Cristian Collini ◽  
Luca Ravagnan ◽  
Gabriele Corbelli ◽  
...  
Keyword(s):  
Microelectrode Arrays ◽  
Cluster Beam ◽  
Cluster Beam Deposition ◽  
Beam Deposition

Ionized-Cluster Beam Deposition

1975 ◽  
pp. 341-346 ◽  
Author(s):  
T. Takagi ◽  
I. Yamada ◽  
K. Yanagawa
Keyword(s):  
Cluster Beam ◽  
Cluster Beam Deposition ◽  
Beam Deposition

Gas Sensor Arrays by Supersonic Cluster Beam Deposition

2019 ◽  
pp. 282-284
Author(s):  
E. Barborini ◽  
M. Leccardi ◽  
G. Bertolini ◽  
O. Rorato ◽  
M. Franchi ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Sensor Arrays ◽  
Cluster Beam ◽  
Cluster Beam Deposition ◽  
Beam Deposition ◽  
Gas Sensor Arrays

Photoluminescence and resonant Raman spectra of silicon films produced by size-selected cluster beam deposition

1997 ◽  
Vol 56 (11) ◽  
pp. 6958-6964 ◽  
Author(s):  
M. Ehbrecht ◽  
B. Kohn ◽  
F. Huisken ◽  
M. A. Laguna ◽  
V. Paillard
Keyword(s):  
Raman Spectra ◽  
Silicon Films ◽  
Cluster Beam ◽  
Resonant Raman ◽  
Cluster Beam Deposition ◽  
Beam Deposition
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