In-situ investigation of surface processes on AlGaAs/GaAs cleavage edges as studied by atomic force microscopy

1995 ◽  
Vol 353 (5-8) ◽  
pp. 670-674
Author(s):  
T. Prohaska ◽  
G. Friedbacher ◽  
M. Grasserbauer ◽  
H. Nickel ◽  
R. L�sch ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Surface Processes ◽  
Force Microscopy ◽  
Atomic Force ◽  
In Situ Investigation

On the Evolution of Surface Morphology of Polysilicon Mems Structures During Fatigue

2000 ◽  
Vol 657 ◽  
Author(s):  
S. M. Allameh ◽  
B. Gally ◽  
S. Brown ◽  
W.O. Soboyejo
Keyword(s):  
Atomic Force Microscopy ◽  
Room Temperature ◽  
Surface Topology ◽  
Ex Situ ◽  
Surface Processes ◽  
Chemical Surface ◽  
Force Microscopy ◽  
Atomic Force ◽  
Large Wavelength

ABSTRACTThis paper presents the results of an atomic force microscopy (AFM) study of the evolution of surface topology in notched polysilicon MEMS structures deformed under cyclic loading at room temperature. The in-situ and ex-situ AFM studies reveal changes in surface topology after cyclic actuation at a relative humidity of ∼70%. These lead ultimately to large wavelength modulations close to the bottom of the notch, in the areas where the tensile stresses are maximum. This is in contrast with the wavelength of the surface modulations away from the notch, which remain relatively unchanged. The results are discussed in terms of possible chemical/surface processes that can occur in the presence of water vapor.

In Situ Investigation of Aluminum Gallium Arsenide/Gallium Arsenide Multilayer Structures under Inert and Reactive Media by Atomic Force Microscopy

1995 ◽  
Vol 67 (9) ◽  
pp. 1530-1535 ◽  
Author(s):  
Thomas. Prohaska ◽  
Gernot. Friedbacher ◽  
Manfred. Grasserbauer ◽  
Heinrich. Nickel ◽  
Rainer. Loesch ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Gallium Arsenide ◽  
Aluminum Gallium Arsenide ◽  
Multilayer Structures ◽  
Force Microscopy ◽  
Atomic Force ◽  
In Situ Investigation ◽  
Reactive Media

In-situ investigation of aerosol particles by atomic force microscopy

1998 ◽  
Vol 361 (6-7) ◽  
pp. 716-721 ◽  
Author(s):  
G. Köllensperger ◽  
G. Friedbacher ◽  
M. Grasserbauer
Keyword(s):  
Atomic Force Microscopy ◽  
Aerosol Particles ◽  
Force Microscopy ◽  
Atomic Force ◽  
In Situ Investigation
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