Proton implantation and rapid thermal annealing effects on GaAs/AlGaAs quantum well infrared photodetectors

1999 ◽  
Vol 26 (5) ◽  
pp. 317-324 ◽  
Author(s):  
Na Li ◽  
Ning Li ◽  
W Lu ◽  
X.Q Liu ◽  
X.Z Yuan ◽  
...  
Keyword(s):  
Quantum Well ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Infrared Photodetectors ◽  
Quantum Well Infrared Photodetectors ◽  
Annealing Effects ◽  
Proton Implantation

Red shifting the intersubband response of quantum‐well infrared photodetectors by thermal annealing

1996 ◽  
Vol 80 (8) ◽  
pp. 4737-4740 ◽  
Author(s):  
J. I. Malin ◽  
P. Liu ◽  
D. K. Sengupta ◽  
W. C. Fang ◽  
S. L. Chuang ◽  
...  
Keyword(s):  
Quantum Well ◽  
Thermal Annealing ◽  
Infrared Photodetectors ◽  
Quantum Well Infrared Photodetectors

Ion Implantation Induced Interdiffusion in Quantum Wells for Optoelectronic Device Integration

2001 ◽  
Vol 692 ◽  
Author(s):  
L. Fu ◽  
H. H. Tan ◽  
M. I. Cohen ◽  
C. Jagadish ◽  
L. V. Dao ◽  
...  
Keyword(s):  
Quantum Well ◽  
Ion Implantation ◽  
Quantum Wells ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Blue Shift ◽  
Optoelectronic Device ◽  
Emission Wavelength ◽  
Device Integration ◽  
Proton Implantation

AbstractIon implantation induced intermixing of GaAs/AlGaAs and InGaAs/AlGaAs quantum wells was studied using low temperature photoluminescence. Large energy shifts were observed with proton implantation and subsequent rapid thermal annealing. Energy shifts were found to be linear as a function of dose for doses as high as ∼5×1016 cm−2. Proton implantation and subsequent rapid thermal annealing was used to tune the emission wavelength of InGaAs quantum well lasers as well as detection wavelength of GaAs/AlGaAs quantum well infrared photodetectors (QWIPs). Emission wavelength of lasers showed blue shift whereas detection wavelength of QWIPs was red shifted with intermixing.

Corrugated Quantum Well Infrared Photodetectors and Arrays

1999 ◽  
Author(s):  
K. K. Choi ◽  
C. J. Chen ◽  
L. P. Rohkinson ◽  
N. C. Das ◽  
M. Jhabvala
Keyword(s):  
Quantum Well ◽  
Infrared Photodetectors ◽  
Quantum Well Infrared Photodetectors

Gain-length scaling in quantum dot/quantum well infrared photodetectors

2009 ◽  
Vol 95 (9) ◽  
pp. 093502 ◽  
Author(s):  
T. Yamanaka ◽  
B. Movaghar ◽  
S. Tsao ◽  
S. Kuboya ◽  
A. Myzaferi ◽  
...  
Keyword(s):  
Quantum Dot ◽  
Quantum Well ◽  
Infrared Photodetectors ◽  
Quantum Well Infrared Photodetectors ◽  
Gain Length ◽  
Length Scaling
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