scholarly journals X-ray photoelectron spectroscopic study of surface modification of low-k organic materials by plasma treatment

2004 ◽  
Vol 36 (8) ◽  
pp. 677-680 ◽  
Author(s):  
Y. Uchida ◽  
T. Fukuda ◽  
H. Yanazawa
Keyword(s):  
Surface Modification ◽  
Spectroscopic Study ◽  
Plasma Treatment ◽  
Organic Materials ◽  
X Ray ◽  
Low K

Effect of CH4 Plasma Treatment on O2 Plasma Ashed Organosilicate Low-k Dielectrics

2007 ◽  
Vol 990 ◽  
Author(s):  
Hualiang Shi ◽  
Junjing Bao ◽  
Junjun liu ◽  
Huai Huang ◽  
Paul S. Ho ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Leakage Current ◽  
Photoelectron Spectroscopy ◽  
Depth Profiling ◽  
Surface Region ◽  
Surface Hydrophobicity ◽  
Moisture Uptake ◽  
Recovery Effect ◽  
X Ray ◽  
Low K

ABSTRACTDuring an O2 plasma ashing process, carbon depletion and subsequent moisture uptake caused increase of keff and the leakage current in an organosilicate (OSG) low-k dielectric. For dielectric restoration, additional CH4 plasma treatment on the O2 plasma ashed OSG low-k dielectric was investigated using angle resolved x-ray photoelectron spectroscopy (ARXPS), XPS depth profiling, x-ray reflectivity (XRR), Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy, and contact angle goniometer. After CH4 plasma treatment on the O2 plasma ashed OSG, the surface carbon concentration and surface hydrophobicity were partially recovered. A dense surface layer containing C=C bonds was found to have formed on the top of the damaged OSG. The C-V hysteresis and the leakage current were reduced as a result of the CH4 plasma treatment. XPS depth profiling revealed that the recovery effect was limited to the surface region.

Infrared spectroscopic study of the YPO4-YCrO4 system

1985 ◽  
Vol 50 (10) ◽  
pp. 2139-2145
Author(s):  
Alexander Muck ◽  
Eva Šantavá ◽  
Bohumil Hájek
Keyword(s):  
Spectroscopic Study ◽  
Infrared Spectra ◽  
Point Of View ◽  
Mixed Crystals ◽  
Crystal Symmetry ◽  
Infrared Spectroscopic Study ◽  
X Ray Diffraction ◽  
X Ray ◽  
Infrared Spectroscopic ◽  
Diffraction Patterns

The infrared spectra and powder X-ray diffraction patterns of polycrystalline YPO4-YCrO4 samples are studied from the point of view of their crystal symmetry. Mixed crystals of the D4h19 symmetry are formed over the region of 0-30 mol.% YPO4 in YCrO4. The Td → D2d → D2 or C2v(GS eff) correlation is appropriate for both PO43- and CrO43- anions.

scholarly journals Non-Thermal Plasma-Modified Ru-Sn-Ti Catalyst for Chlorinated Volatile Organic Compound Degradation

Catalysts ◽  
2020 ◽  
Vol 10 (12) ◽  
pp. 1456
Author(s):  
Yujie Fu ◽  
You Zhang ◽  
Qi Xin ◽  
Zhong Zheng ◽  
Yu Zhang ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Photoelectron Spectroscopy ◽  
High Surface ◽  
High Surface Area ◽  
Surface Oxidation ◽  
Treatment Method ◽  
X Ray ◽  
Chlorinated Volatile Organic Compounds ◽  
Volatile Organic ◽  
Doped Titania

Chlorinated volatile organic compounds (CVOCs) are vital environmental concerns due to their low biodegradability and long-term persistence. Catalytic combustion technology is one of the more commonly used technologies for the treatment of CVOCs. Catalysts with high low-temperature activity, superior selectivity of non-toxic products, and resistance to chlorine poisoning are desirable. Here we adopted a plasma treatment method to synthesize a tin-doped titania loaded with ruthenium dioxide (RuO2) catalyst, possessing enhanced activity (T90%, the temperature at which 90% of dichloromethane (DCM) is decomposed, is 262 °C) compared to the catalyst prepared by the conventional calcination method. As revealed by transmission electron microscopy, X-ray diffraction, N2 adsorption, X-ray photoelectron spectroscopy, and hydrogen temperature-programmed reduction, the high surface area of the tin-doped titania catalyst and the enhanced dispersion and surface oxidation of RuO2 induced by plasma treatment were found to be the main factors determining excellent catalytic activities.

Unraveling the Substrate−Metal Binding Site of Ferrochelatase:  An X-ray Absorption Spectroscopic Study†

Biochemistry ◽  
2002 ◽  
Vol 41 (15) ◽  
pp. 4809-4818 ◽  
Author(s):  
Gloria C. Ferreira ◽  
Ricardo Franco ◽  
Arianna Mangravita ◽  
Graham N. George
Keyword(s):  
Spectroscopic Study ◽  
Binding Site ◽  
Metal Binding ◽  
Metal Binding Site ◽  
X Ray ◽  
Substrate Metal ◽  
X Ray Absorption

scholarly journals Operando soft X-ray absorption spectroscopic study on microporous carbon-supported sulfur cathodes

RSC Advances ◽  
2020 ◽  
Vol 10 (65) ◽  
pp. 39875-39880
Author(s):  
Yao Xiao ◽  
Kentaro Yamamoto ◽  
Yukiko Matsui ◽  
Toshiki Watanabe ◽  
Koji Nakanishi ◽  
...  
Keyword(s):  
Reaction Mechanism ◽  
Spectroscopic Study ◽  
Microporous Carbon ◽  
Sulfur Cathode ◽  
X Ray ◽  
X Ray Absorption ◽  
Sulfur Cathodes

The reaction mechanism of the sulfur cathode in the microporous carbon during discharge was observed by operando XAS.

scholarly journals Assessment of Titanate Nanolayers in Terms of Their Physicochemical and Biological Properties

Materials ◽  
2021 ◽  
Vol 14 (4) ◽  
pp. 806
Author(s):  
Michalina Ehlert ◽  
Aleksandra Radtke ◽  
Katarzyna Roszek ◽  
Tomasz Jędrzejewski ◽  
Piotr Piszczek
Keyword(s):  
Surface Modification ◽  
Substrate Surface ◽  
Biological Properties ◽  
Structure Characterization ◽  
Porous Coating ◽  
Apatite Formation ◽  
Sem Images ◽  
Energy Dispersion Spectroscopy ◽  
X Ray

The surface modification of titanium substrates and its alloys in order to improve their osseointegration properties is one of widely studied issues related to the design and production of modern orthopedic and dental implants. In this paper, we discuss the results concerning Ti6Al4V substrate surface modification by (a) alkaline treatment with a 7 M NaOH solution, and (b) production of a porous coating (anodic oxidation with the use of potential U = 5 V) and then treating its surface in the abovementioned alkaline solution. We compared the apatite-forming ability of unmodified and surface-modified titanium alloy in simulated body fluid (SBF) for 1–4 weeks. Analysis of the X-ray diffraction patterns of synthesized coatings allowed their structure characterization before and after immersing in SBF. The obtained nanolayers were studied using Raman spectroscopy, diffuse reflectance infrared Fourier transform spectroscopy (DRIFT), and scanning electron microscopy (SEM) images. Elemental analysis was carried out using X-ray energy dispersion spectroscopy (SEM EDX). Wettability and biointegration activity (on the basis of the degree of integration of MG-63 osteoblast-like cells, L929 fibroblasts, and adipose-derived mesenchymal stem cells cultured in vitro on the sample surface) were also evaluated. The obtained results proved that the surfaces of Ti6Al4V and Ti6Al4V covered by TiO2 nanoporous coatings, which were modified by titanate layers, promote apatite formation in the environment of body fluids and possess optimal biointegration properties for fibroblasts and osteoblasts.

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