Grazing-incidence x-ray photoemission spectroscopy and the accuracy of thickness measurements of CMOS gate dielectrics

2001 ◽  
Vol 31 (8) ◽  
pp. 768-777 ◽  
Author(s):  
Terrence Jach ◽  
Eric Landree
Keyword(s):  
Gate Dielectrics ◽  
Grazing Incidence ◽  
Photoemission Spectroscopy ◽  
X Ray ◽  
Thickness Measurements

scholarly journals Gas-induced selective re-orientation of Au–Cu nanoparticles on TiO2 (110)

Nanoscale ◽  
2019 ◽  
Vol 11 (2) ◽  
pp. 752-761 ◽  
Author(s):  
Axel Wilson ◽  
Aude Bailly ◽  
Romain Bernard ◽  
Yves Borensztein ◽  
Alessandro Coati ◽  
...  
Keyword(s):  
Bimetallic Nanoparticles ◽  
Grazing Incidence ◽  
Low Pressure ◽  
Photoemission Spectroscopy ◽  
Cu Nanoparticles ◽  
X Ray Diffraction ◽  
X Ray ◽  
Different Temperatures

Au–Cu bimetallic nanoparticles (NPs) grown on TiO2(110) have been followed in situ using grazing incidence X-ray diffraction and X-ray photoemission spectroscopy from their synthesis to their exposure to a CO/O2 mixture at low pressure (P < 10−5 mbar) and at different temperatures (300 K–470 K).

Grazing incidence X-ray photoemission spectroscopy of SiO2 on Si

1999 ◽  
Vol 54 (10) ◽  
pp. 1539-1544 ◽  
Author(s):  
Terrence Jach ◽  
Jerome Gormley ◽  
Stephen Thurgate
Keyword(s):  
Grazing Incidence ◽  
Photoemission Spectroscopy ◽  
X Ray

Analysis of x-ray irradiation effect in high-k gate dielectrics by time-dependent photoemission spectroscopy using synchrotron radiation

2008 ◽  
Vol 40 (13) ◽  
pp. 1606-1609 ◽  
Author(s):  
T. Tanimura ◽  
S. Toyoda ◽  
H. Kumigashira ◽  
M. Oshima ◽  
K. Ikeda ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Gate Dielectrics ◽  
Time Dependent ◽  
Photoemission Spectroscopy ◽  
Irradiation Effect ◽  
X Ray ◽  
High K

Analysis of electroless nickel thin films

1991 ◽  
Vol 49 ◽  
pp. 510-511 ◽  
Author(s):  
C. W. Price ◽  
E. F. Lindsey
Keyword(s):  
Thin Films ◽  
Inertial Confinement Fusion ◽  
Electroless Nickel ◽  
Inertial Confinement ◽  
Plating Bath ◽  
X Ray ◽  
Nickel Thin Films ◽  
Nickel Deposits ◽  
Confinement Fusion ◽  
Thickness Measurements

Thickness measurements of thin films are performed by both energy-dispersive x-ray spectroscopy (EDS) and x-ray fluorescence (XRF). XRF can measure thicker films than EDS, and XRF measurements also have somewhat greater precision than EDS measurements. However, small components with curved or irregular shapes that are used for various applications in the the Inertial Confinement Fusion program at LLNL present geometrical problems that are not conducive to XRF analyses but may have only a minimal effect on EDS analyses. This work describes the development of an EDS technique to measure the thickness of electroless nickel deposits on gold substrates. Although elaborate correction techniques have been developed for thin-film measurements by x-ray analysis, the thickness of electroless nickel films can be dependent on the plating bath used. Therefore, standard calibration curves were established by correlating EDS data with thickness measurements that were obtained by contact profilometry.

X-RAY STUDIES RELATED TO COATING THICKNESS MEASUREMENTS

1984 ◽  
Vol 45 (C2) ◽  
pp. C2-33-C2-36 ◽  
Author(s):  
D. A. Sewell ◽  
I. D. Hall ◽  
G. Love ◽  
J. P. Partridge ◽  
V. D. Scott
Keyword(s):  
Coating Thickness ◽  
X Ray ◽  
Thickness Measurements

Synthesis and characterization of TiN / Ti / AISI 410 coatings

2018 ◽  
Vol 2 (1) ◽  
pp. 7
Author(s):  
S Chirino ◽  
Jaime Diaz ◽  
N Monteblanco ◽  
E Valderrama
Keyword(s):  
Synthesis And Characterization ◽  
Photoemission Spectroscopy ◽  
X Ray Diffraction ◽  
X Ray ◽  
Columnar Grains ◽  
Tin Thin Films ◽  
Steel Aisi ◽  
Interacting Surfaces ◽  
Stainless Steel Aisi

The synthesis and characterization of Ti and TiN thin films of different thicknesses was carried out on a martensitic stainless steel AISI 410 substrate used for tool manufacturing. The mechanical parameters between the interacting surfaces such as thickness, adhesion and hardness were measured. By means of the scanning electron microscope (SEM) the superficial morphology of the Ti/TiN interface was observed, finding that the growth was of columnar grains and by means of EDAX the existence of titanium was verified.  Using X-ray diffraction (XRD) it was possible to observe the presence of residual stresses (~ -3.1 GPa) due to the different crystalline phases in the coating. Under X-ray photoemission spectroscopy (XPS) it was possible to observe the molecular chemical composition of the coating surface, being Ti-N, Ti-N-O and Ti-O the predominant ones.

New Structure of CTAB Templated Silica Films as revealed by GISAXS coupled to HRTEM

2000 ◽  
Vol 628 ◽  
Author(s):  
Sophie Besson ◽  
Catherine Jacquiod ◽  
Thierry Gacoin ◽  
André Naudon ◽  
Christian Ricolleau ◽  
...  
Keyword(s):  
Cetyltrimethylammonium Bromide ◽  
Grazing Incidence ◽  
Hexagonal Structure ◽  
X Ray Diffraction ◽  
Electronic Microscopy ◽  
Silica Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Hexagonal Arrangement ◽  
Spherical Micelles

ABSTRACTA microstructural study on surfactant templated silica films is performed by coupling traditional X-Ray Diffraction (XRD) and Transmission Electronic Microscopy (TEM) to Grazing Incidence Small Angle X-Ray Scattering (GISAXS). By this method it is shown that spin-coating of silicate solutions with cationic surfactant cetyltrimethylammonium bromide (CTAB) as a templating agent provides 3D hexagonal structure (space group P63/mmc) that is no longer compatible with the often described hexagonal arrangement of tubular micelles but rather with an hexagonal arrangement of spherical micelles. The extent of the hexagonal ordering and the texture can be optimized in films by varying the composition of the solution.

X-Ray Fluorescence Spectrometer with Geometry of Grazing Incidence X-ray Radiation

2012 ◽  
Vol 1 (2) ◽  
pp. 78-82
Author(s):  
N.M. Novikovskii ◽  
◽  
V.M. Raznomazov ◽  
V.O. Ponomarenko ◽  
D.A. Sarychev ◽  
...  
Keyword(s):  
Grazing Incidence ◽  
X Ray ◽  
Fluorescence Spectrometer
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