Analysis of inhomogeneous thin films of ZrO2by the combined optical method and atomic force microscopy
Keyword(s):
1999 ◽
Vol 353
(1-2)
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pp. 194-200
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Keyword(s):
2012 ◽
Vol 30
(2)
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pp. 021605
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2003 ◽
Vol 65
(4)
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pp. 406-415
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2018 ◽
Vol 343
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pp. 012006
Keyword(s):
1997 ◽
Vol 12
(8)
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pp. 1942-1945
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