scholarly journals Determination of tolerance limits for the reliability of semiconductor devices using longitudinal data

2017 ◽  
Vol 33 (8) ◽  
pp. 2673-2683
Author(s):  
Vera Hofer ◽  
Johannes Leitner ◽  
Horst Lewitschnig ◽  
Thomas Nowak
Author(s):  
Romain Desplats ◽  
Timothee Dargnies ◽  
Jean-Christophe Courrege ◽  
Philippe Perdu ◽  
Jean-Louis Noullet

Abstract Focused Ion Beam (FIB) tools are widely used for Integrated Circuit (IC) debug and repair. With the increasing density of recent semiconductor devices, FIB operations are increasingly challenged, requiring access through 4 or more metal layers to reach a metal line of interest. In some cases, accessibility from the front side, through these metal layers, is so limited that backside FIB operations appear to be the most appropriate approach. The questions to be resolved before starting frontside or backside FIB operations on a device are: 1. Is it do-able, are the metal lines accessible? 2. What is the optimal positioning (e.g. accessing a metal 2 line is much faster and easier than digging down to a metal 6 line)? (for the backside) 3. What risk, time and cost are involved in FIB operations? In this paper, we will present a new approach, which allows the FIB user or designer to calculate the optimal FIB operation for debug and IC repair. It automatically selects the fastest and easiest milling and deposition FIB operations.


2003 ◽  
Vol 68 (1) ◽  
pp. 65-73 ◽  
Author(s):  
Randjel Mihajlovic ◽  
Natasa Ignjatovic ◽  
Marija Todorovic ◽  
Ivanka Holclajtner-Antunovic ◽  
Vesna Kaljevic

A modified spectrophotometric method using the bismuth phosphomolybdate complex for the determination of phosphorus in coal and coal ash is suggested. Bismuth together with phosphate and molybdate forms a very stable complex in acid medium which turns blue ("molibdenum blue") by reduction with ascorbic acid. The apparent molar absorptivity of PBiMo is 1.66x104 dm3 mol-1cm-1 at 720 nm and 2.10x104 dm3 mol-1cm-1 at 670 nm isobutyl methyl ketone (MIBK). Interference caused by the ions present are within the tolerance limits (?2 %). Beer?s law is obeyed in the for concentration range to 0.6 ?g/mL (aqueous solution) and to 1.2 ?g/mL P (MIBK). The sensitivity of the proposed method is 0.0078 ?g/mL (aqueous solution) and 0.0066 ?g/mL (MIBK).


AIP Advances ◽  
2018 ◽  
Vol 8 (5) ◽  
pp. 055203 ◽  
Author(s):  
K. Piskorski ◽  
V. Passi ◽  
J. Ruhkopf ◽  
M. C. Lemme ◽  
H. M. Przewlocki

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