Thermal processing induced structural changes in ZnO films grown on (11&2macr;0) sapphire substrates using molecular beam epitaxy

2004 ◽  
Vol 1 (4) ◽  
pp. 868-871
Author(s):  
P. Fons ◽  
H. Tampo ◽  
K. Nakahara ◽  
A. Yamada ◽  
K. Matsubara ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Thermal Processing ◽  
Molecular Beam ◽  
Structural Changes ◽  
Zno Films ◽  
Sapphire Substrates

ZnO and ZnMgO Growth by Molecular Beam Epitaxy

2002 ◽  
Vol 744 ◽  
Author(s):  
Mitsuaki Yano ◽  
Ken-ichi Ogata ◽  
FengPing Yan ◽  
Kazuto Koike ◽  
Shigehiko Sasa ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Zno Films ◽  
Cell Temperature ◽  
Rich Region ◽  
Single Crystalline ◽  
Sapphire Substrates ◽  
Simple Growth ◽  
Mg Content ◽  
Crystalline Growth

ABSTRACTCharacteristics of the ZnO and ZnMgO films grown by radical-source molecular beam epitaxy are reported. The ZnO films on a-plane sapphire substrates had a superior quality in crystallographic, optical and electrical properties, and n-type doping with Al was successfully performed up to 1020 cm–3. The Mg-content of ZnMgO alloys was found to be controlled by a simple growth mechanism as a function of Mg-cell temperature. The alloying in the ZnO-rich region resulted in single-crystalline growth although the photoluminescence characteristics at x = 0.22 suggested the presence of microscopic phase separation. Single-crystalline growth was also achieved on Si (111) substrates by using a CaF2 buffer layer to protect the Si-surface from oxidation.

Properties of (11–20) a-plane ZnO films on sapphire substrates grown at different temperatures by plasma-assisted molecular beam epitaxy

2011 ◽  
Vol 519 (19) ◽  
pp. 6394-6398 ◽  
Author(s):  
Seok Kyu Han ◽  
Soon-Ku Hong ◽  
Jae Wook Lee ◽  
Jae Goo Kim ◽  
Myoungho Jeong ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Zno Films ◽  
Sapphire Substrates ◽  
Different Temperatures

Growth condition dependence of morphology and electric properties of ZnO films on sapphire substrates prepared by molecular beam epitaxy

2003 ◽  
Vol 93 (4) ◽  
pp. 1961-1965 ◽  
Author(s):  
Takeshi Ohgaki ◽  
Naoki Ohashi ◽  
Hirofumi Kakemoto ◽  
Satoshi Wada ◽  
Yutaka Adachi ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Growth Condition ◽  
Molecular Beam ◽  
Electric Properties ◽  
Condition Dependence ◽  
Zno Films ◽  
Sapphire Substrates
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