Thermal conductivity of nanocrystalline diamond films grown by hot filament chemical vapor deposition

Markus Mohr; Kai Brühne; Hans-Jörg Fecht

doi:10.1002/pssa.201600171

Thermal conductivity of nanocrystalline diamond films grown by hot filament chemical vapor deposition

physica status solidi (a) ◽

10.1002/pssa.201600171 ◽

2016 ◽

Vol 213 (10) ◽

pp. 2590-2593 ◽

Cited By ~ 1

Author(s):

Markus Mohr ◽

Kai Brühne ◽

Hans-Jörg Fecht

Keyword(s):

Thermal Conductivity ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

Hot Filament

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Doping of vanadium to nanocrystalline diamond films by hot filament chemical vapor deposition

Nanoscale Research Letters ◽

10.1186/1556-276x-7-441 ◽

2012 ◽

Vol 7 (1) ◽

Cited By ~ 4

Author(s):

Yaozhong Zhang ◽

Liying Zhang ◽

Jiang Zhao ◽

Liang Wang ◽

Gang Zhao ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

Hot Filament

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Tribological properties of nanocrystalline diamond films deposited by hot filament chemical vapor deposition

AIP Advances ◽

10.1063/1.4751272 ◽

2012 ◽

Vol 2 (3) ◽

pp. 032164 ◽

Cited By ~ 16

Author(s):

N. Kumar ◽

K. Panda ◽

S. Dash ◽

C. Popov ◽

J. P. Reithmaier ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Tribological Properties ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

Hot Filament

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Characterization of boron-doped micro- and nanocrystalline diamond films deposited by wafer-scale hot filament chemical vapor deposition for MEMS applications

Diamond and Related Materials ◽

10.1016/j.diamond.2007.09.010 ◽

2008 ◽

Vol 17 (1) ◽

pp. 23-28 ◽

Cited By ~ 34

Author(s):

Jingchun Zhang ◽

Jerry W. Zimmer ◽

Roger T. Howe ◽

Roya Maboudian

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Wafer Scale ◽

Boron Doped ◽

Nanocrystalline Diamond Films ◽

Hot Filament

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Synthesis of nanocrystalline diamond films by DC plasma-assisted argon-rich hot filament chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2007.10.012 ◽

2008 ◽

Vol 17 (1) ◽

pp. 55-59 ◽

Cited By ~ 14

Author(s):

Kishore Uppireddi ◽

Brad R. Weiner ◽

Gerardo Morell

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Dc Plasma ◽

Nanocrystalline Diamond Films ◽

Hot Filament

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Controllable Growth of Nanocrystalline Diamond Films by Hot-Filament Chemical Vapor Deposition Method

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2009.c088 ◽

2009 ◽

Vol 9 (2) ◽

pp. 1062-1065 ◽

Cited By ~ 2

Author(s):

Yunlong Li ◽

Junjie Li ◽

Qiang Wang ◽

Yang Yang ◽

Changzhi Gu

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Nanocrystalline Diamond Films ◽

Controllable Growth ◽

Hot Filament

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Low temperature growths of nanocrystalline diamond films by plasma-assisted hot filament chemical vapor deposition

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.07.035 ◽

2006 ◽

Vol 200 (10) ◽

pp. 3160-3165 ◽

Cited By ~ 8

Author(s):

Shr-Ming Huang ◽

Franklin Chau-Nan Hong

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

Hot Filament

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Study of Undoped Nanocrystalline Diamond Films Grown by Microwave Plasma-Assisted Chemical Vapor Deposition

Semiconductors ◽

10.1134/s106378262101019x ◽

2021 ◽

Vol 55 (1) ◽

pp. 66-75

Author(s):

A. L. Vikharev ◽

S. A. Bogdanov ◽

N. M. Ovechkin ◽

O. A. Ivanov ◽

D. B. Radishev ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films

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Bulk and surface thermal stability of ultra nanocrystalline diamond films with 10–30 nm grain size prepared by chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.3359714 ◽

2010 ◽

Vol 107 (9) ◽

pp. 093521 ◽

Cited By ~ 21

Author(s):

Sh. Michaelson ◽

A. Stacey ◽

J. Orwa ◽

A. Cimmino ◽

S. Prawer ◽

...

Keyword(s):

Thermal Stability ◽

Grain Size ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films ◽

Thermal Stability Of

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Control of plasma space potentials and chemical vapor deposition of nanocrystalline diamond films in surface-wave excited low-pressure plasmas

Journal of Applied Physics ◽

10.1063/1.2409761 ◽

2007 ◽

Vol 101 (2) ◽

pp. 023301 ◽

Cited By ~ 11

Author(s):

Jaeho Kim ◽

Makoto Katsurai

Keyword(s):

Chemical Vapor Deposition ◽

Surface Wave ◽

Vapor Deposition ◽

Diamond Films ◽

Chemical Vapor ◽

Low Pressure ◽

Nanocrystalline Diamond ◽

Nanocrystalline Diamond Films

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Cytotoxicity of Boron-Doped Nanocrystalline Diamond Films Prepared by Microwave Plasma Chemical Vapor Deposition

Plasma Science and Technology ◽

10.1088/1009-0630/17/7/08 ◽

2015 ◽

Vol 17 (7) ◽

pp. 574-578

Author(s):

Dan Liu ◽

Li Gou ◽

Junguo Ran ◽

Hong Zhu ◽

Xiang Zhang

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Diamond Films ◽

Chemical Vapor ◽

Nanocrystalline Diamond ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Boron Doped ◽

Nanocrystalline Diamond Films

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