Ion and Vacuum Ultraviolet Photon Beam Effects in 193 nm Photoresist Surface Roughening: The Role of the Adamantyl Pendant Group

2011 ◽  
Vol 8 (11) ◽  
pp. 1068-1079 ◽  
Author(s):  
Ting-Ying Chung ◽  
David B. Graves ◽  
Florian Weilnboeck ◽  
Robert L. Bruce ◽  
Gottlieb S. Oehrlein ◽  
...  
Keyword(s):  
Vacuum Ultraviolet ◽  
Photon Beam ◽  
Surface Roughening ◽  
Pendant Group ◽  
193 Nm

Plasma impact on 193 nm photoresist linewidth roughness: Role of plasma vacuum ultraviolet light

2009 ◽  
Vol 94 (10) ◽  
pp. 103111 ◽  
Author(s):  
E. Pargon ◽  
M. Martin ◽  
K. Menguelti ◽  
L. Azarnouche ◽  
J. Foucher ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Vacuum Ultraviolet ◽  
193 Nm

Electron, ion and vacuum ultraviolet photon effects in 193 nm photoresist surface roughening

2010 ◽  
Vol 43 (27) ◽  
pp. 272001 ◽  
Author(s):  
T-Y Chung ◽  
D Nest ◽  
D B Graves ◽  
F Weilnboeck ◽  
R L Bruce ◽  
...  
Keyword(s):  
Vacuum Ultraviolet ◽  
Surface Roughening ◽  
193 Nm

The vacuum ultraviolet photolysis of hydrogen chloride. The role of the hot hydrogen atoms

1981 ◽  
Vol 55 (1-2) ◽  
pp. 9-15 ◽  
Author(s):  
A. Jówko ◽  
S. U. Pavlova ◽  
H. Baj ◽  
B. G. Dzantiev ◽  
M. Foryś
Keyword(s):  
Hydrogen Chloride ◽  
Vacuum Ultraviolet ◽  
Hydrogen Atoms ◽  
Ultraviolet Photolysis

scholarly journals K0SΣ0 photoproduction at the BGO-OD experiment

2020 ◽  
Vol 241 ◽  
pp. 01009
Author(s):  
Katrin Kohl ◽  
Stefan Alef ◽  
Patrick Bauer ◽  
Reinhard Beck ◽  
Alessandro Braghieri ◽  
...  
Keyword(s):  
Vector Meson ◽  
Momentum Transfer ◽  
Cross Section ◽  
Photon Beam ◽  
Bremsstrahlung Photon ◽  
Meson Photoproduction ◽  
Accelerator Facility ◽  
Transfer Processes

The BGO-OD experiment at the ELSA accelerator facility uses an energy tagged bremsstrahlung photon beam to investigate the excitation structure of the nucleon via meson photoproduction. The setup with a BGO calorimeter surrounding the target and an open dipole spectrometer covering the for ward region is ideally suited for investigating low momentum transfer processes, in particular in strangeness photoproduction. The associated photoproduction of K0S and hyperons is essential to understand the role of K* exchange mech anisms. A cusp-like structure observed in the yp → K0SΣ+ reaction at the K* threshold is described by models including dynamically generated resonances from vector meson-baryon interactions. Such interactions are pre dicted to give a peak like structure in K0SΣ0 photoproduction off the neutron. A very preliminary cross section is determined and compared to the prediction, the results appear to support the model

Promotional role of Mn doping on catalytic oxidation of VOCs over mesoporous TiO2 under vacuum ultraviolet (VUV) irradiation

2018 ◽  
Vol 220 ◽  
pp. 78-87 ◽  
Author(s):  
Yajie Shu ◽  
Jian Ji ◽  
Ying Xu ◽  
Jiguang Deng ◽  
Haibao Huang ◽  
...  
Keyword(s):  
Catalytic Oxidation ◽  
Vacuum Ultraviolet ◽  
Mesoporous Tio2 ◽  
Mn Doping

Vacuum ultraviolet spectrum and quantum yield of the 193 nm photolysis of phosgene

1996 ◽  
Vol 263 (6) ◽  
pp. 817-821 ◽  
Author(s):  
Martin Jäger ◽  
Horst Heydtmann ◽  
Cornelius Zetzsch
Keyword(s):  
Quantum Yield ◽  
Vacuum Ultraviolet ◽  
Ultraviolet Spectrum ◽  
193 Nm
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