Plasma impact on 193 nm photoresist linewidth roughness: Role of plasma vacuum ultraviolet light

2009 ◽  
Vol 94 (10) ◽  
pp. 103111 ◽  
Author(s):  
E. Pargon ◽  
M. Martin ◽  
K. Menguelti ◽  
L. Azarnouche ◽  
J. Foucher ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Vacuum Ultraviolet ◽  
193 Nm

Vacuum ultraviolet light generation at 193 nm by quasi-phase-matched quartz

2011 ◽  
Author(s):  
Masaki Harada ◽  
Muneyuki Adachi ◽  
Ken-ichi Muramatsu ◽  
Motoi Ueda ◽  
Tsuyoshi Yamada ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Vacuum Ultraviolet ◽  
Light Generation ◽  
193 Nm

Ion and Vacuum Ultraviolet Photon Beam Effects in 193 nm Photoresist Surface Roughening: The Role of the Adamantyl Pendant Group

2011 ◽  
Vol 8 (11) ◽  
pp. 1068-1079 ◽  
Author(s):  
Ting-Ying Chung ◽  
David B. Graves ◽  
Florian Weilnboeck ◽  
Robert L. Bruce ◽  
Gottlieb S. Oehrlein ◽  
...  
Keyword(s):  
Vacuum Ultraviolet ◽  
Photon Beam ◽  
Surface Roughening ◽  
Pendant Group ◽  
193 Nm

Simultaneous removal of NO and SO2 using vacuum ultraviolet light (VUV)/heat/peroxymonosulfate (PMS)

Chemosphere ◽  
2018 ◽  
Vol 190 ◽  
pp. 431-441 ◽  
Author(s):  
Yangxian Liu ◽  
Yan Wang ◽  
Qian Wang ◽  
Jianfeng Pan ◽  
Jun Zhang
Keyword(s):  
Ultraviolet Light ◽  
Vacuum Ultraviolet ◽  
Simultaneous Removal

Surface modification of polymeric thin films with vacuum ultraviolet light

2008 ◽  
Vol 40 (3-4) ◽  
pp. 400-403 ◽  
Author(s):  
E. Sarantopoulou ◽  
J. Kovač ◽  
Z. Kollia ◽  
I. Raptis ◽  
S. Kobe ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Modification ◽  
Ultraviolet Light ◽  
Vacuum Ultraviolet ◽  
Polymeric Thin Films

scholarly journals 300-mW narrow-linewidth deep-ultraviolet light generation at 193 nm by frequency mixing between Yb-hybrid and Er-fiber lasers

2015 ◽  
Vol 23 (8) ◽  
pp. 10564 ◽  
Author(s):  
Hongwen Xuan ◽  
Zhigang Zhao ◽  
Hironori Igarashi ◽  
Shinji Ito ◽  
Kouji Kakizaki ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Fiber Lasers ◽  
Narrow Linewidth ◽  
Deep Ultraviolet ◽  
Light Generation ◽  
193 Nm ◽  
Frequency Mixing

The vacuum ultraviolet photolysis of hydrogen chloride. The role of the hot hydrogen atoms

1981 ◽  
Vol 55 (1-2) ◽  
pp. 9-15 ◽  
Author(s):  
A. Jówko ◽  
S. U. Pavlova ◽  
H. Baj ◽  
B. G. Dzantiev ◽  
M. Foryś
Keyword(s):  
Hydrogen Chloride ◽  
Vacuum Ultraviolet ◽  
Hydrogen Atoms ◽  
Ultraviolet Photolysis

Role of Ceramides in Skin Stress: Ultraviolet Light, Tape Stripping and Crowding

2003 ◽  
Vol 2 (6) ◽  
pp. 286-294 ◽  
Author(s):  
Myeong Jun Choi ◽  
Howard I. Maibach
Keyword(s):  
Ultraviolet Light ◽  
Tape Stripping
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