Photoresist modifications by plasma vacuum ultraviolet radiation: The role of polymer structure and plasma chemistry

2010 ◽  
Vol 28 (5) ◽  
pp. 993-1004 ◽  
Author(s):  
F. Weilnboeck ◽  
R. L. Bruce ◽  
S. Engelmann ◽  
G. S. Oehrlein ◽  
D. Nest ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Vacuum Ultraviolet ◽  
Plasma Chemistry ◽  
Polymer Structure ◽  
Vacuum Ultraviolet Radiation

Effects of aging on poly(1-trimethylsilyl-1-propyne) membranes irradiated with vacuum ultraviolet radiation for gas separation

2017 ◽  
Vol 135 (11) ◽  
pp. 45973 ◽  
Author(s):  
Tetsuro Yoshioka ◽  
Yoshiki Miyashita ◽  
Taichi Motoo ◽  
Kentaro Saito ◽  
Kazukiyo Nagai
Keyword(s):  
Ultraviolet Radiation ◽  
Gas Separation ◽  
Vacuum Ultraviolet ◽  
Vacuum Ultraviolet Radiation ◽  
Effects Of Aging

Creation of photostimulable centers in BaFBr:Eu2+single crystals by vacuum ultraviolet radiation

1990 ◽  
Vol 65 (19) ◽  
pp. 2438-2441 ◽  
Author(s):  
H. H. Rüter ◽  
H. v. Seggern ◽  
R. Reininger ◽  
V. Saile
Keyword(s):  
Ultraviolet Radiation ◽  
Single Crystals ◽  
Vacuum Ultraviolet ◽  
Vacuum Ultraviolet Radiation
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