Plasma Jet Coupled with Nd:YAG Laser: New Approach to Surface Cleaning

2007 ◽  
Vol 4 (S1) ◽  
pp. S33-S38 ◽  
Author(s):  
Nils Mainusch ◽  
Christina Pflugfelder ◽  
Jürgen Ihlemann ◽  
Wolfgang Viöl
Keyword(s):  
Nd:Yag Laser ◽  
Plasma Jet ◽  
Surface Cleaning ◽  
New Approach

Multipulse passively Q-switched Nd:YAG laser for material surface cleaning

2002 ◽  
Author(s):  
Constantin G. Fenic ◽  
Aurel Stratan ◽  
Razvan V. Dabu ◽  
Ion N. Mihailescu ◽  
Constantin Blanaru ◽  
...  
Keyword(s):  
Nd:Yag Laser ◽  
Surface Cleaning ◽  
Material Surface

scholarly journals Advances in precision freeform manufacturing by plasma jet machining -INVITED

2020 ◽  
Vol 238 ◽  
pp. 03001
Author(s):  
Thomas Arnold ◽  
Georg Boehm ◽  
Faezeh Kazemi
Keyword(s):  
Alkali Metals ◽  
Optical Glass ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Fused Silica ◽  
Residual Layer ◽  
New Approach ◽  
Optical Glasses ◽  
Freeform Optics ◽  
Chemical Material

Atmospheric pressure plasma jet machining technology provides a flexible and efficient way to fabricate precise freeform optics. Due to the pure chemical material removal mechanism based on a dry etching process using fluorine containing gas, the choice of materials that can be treated is limited. Fused silica, Si, SiC or ULE® are easy to machine since the etching products formed are solely volatile. Recently, plasma jet machining has been also adopted to treat optical glasses like N-BK7® which contain amongst others alkali metals that form a solid residual layer during etching. In the paper a new approach to apply deterministic plasma jet etching on optical glass coping with complex etch characteristics caused by the residual layer is introduced.

Surface Cleaning Using an Atmospheric-Pressure Plasma Jet in $\hbox{O}_{2}/\hbox{Ar}$ Mixtures

2012 ◽  
Vol 40 (10) ◽  
pp. 2706-2710 ◽  
Author(s):  
Ying Jin ◽  
Chun-Sheng Ren ◽  
Qian-Qian Fan ◽  
Huijie Yan ◽  
Zhifen Li ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Surface Cleaning ◽  
Atmospheric Pressure Plasma Jet ◽  
Pressure Plasma

A New Approach for FEOL Critical Wafer Surface Cleaning

2019 ◽  
Vol 11 (2) ◽  
pp. 167-174
Author(s):  
Thomas Fischer ◽  
Suraj Puri ◽  
Ronald Hoyer ◽  
Kurt L. Wostyn ◽  
Tom Janssens
Keyword(s):  
Surface Cleaning ◽  
Wafer Surface ◽  
New Approach

In-Situ Surface Cleaning of Ge(111) and Si(100) for Epitaxial Growth of Ge AT 300°C Using Remote Plasma Enhanced Chemical Vapor Deposition

1987 ◽  
Vol 102 ◽  
Author(s):  
S. V. Hattangady ◽  
R. A. Rudder ◽  
G. G. Fountain ◽  
D. J. Vitkavage ◽  
R. J. Markunas
Keyword(s):  
Vapor Deposition ◽  
Hydrogen Plasma ◽  
Chemical Vapor ◽  
High Energy ◽  
Surface Cleaning ◽  
High Energy Electron ◽  
New Approach ◽  
Wet Chemistry ◽  
Plasma Treatments

We have demonstrated low temperature (300°C) Ge epitaxy on Ge(111) and on Si(100) substrates. Critical to this epitaxy has been the use of wet chemistry to produce controlled, thin oxides on the substrates prior to loading into the reactor and an in-situ 300°C hydrogen plasma treatment to remove those oxides from the semiconductor surfaces. Reflection high energy electron diffraction shows the plasma treatments to be effective in producing clean, well-ordered surfaces. This represents a new approach for in-situ cleaning of Ge(111) and Si(100) surfaces.

Preliminary studies of material surface cleaning with a multi-pulse passively Q-switched Nd:YAG laser

2004 ◽  
Vol 36 (2) ◽  
pp. 125-130 ◽  
Author(s):  
Constantin Fenic ◽  
Razvan Dabu ◽  
Aurel Stratan ◽  
Constantin Blanaru ◽  
Constantin Ungureanu ◽  
...  
Keyword(s):  
Nd:Yag Laser ◽  
Surface Cleaning ◽  
Material Surface

scholarly journals Laser Beam Welding of AA5052, AA5083, and AA6061 Aluminum Alloys

2009 ◽  
Vol 2009 ◽  
pp. 1-9 ◽  
Author(s):  
A. El-Batahgy ◽  
M. Kutsuna
Keyword(s):  
Fusion Zone ◽  
Base Metal ◽  
Welding Speed ◽  
Filler Metal ◽  
Surface Cleaning ◽  
Solidification Cracking ◽  
Welding Parameters ◽  
Manufacturing Cost ◽  
New Approach ◽  
Aa6061 Alloy

The present investigation was mainly concerned with characteristics of autogeneous laser butt welding of 2 mm thickness nonheat treatableAA5052-H12,AA5083-H12 and 2 mm, 3 mm thickness heat treatableAA6061-T6aluminum alloys. The effect of laser welding parameters, surface cleaning, filler wire addition, and backing strip on quality of laser welded joints was clarified using 5 kW laser machine. It was found that all the investigated alloys showed tendencies for porosity and solidification cracking, particularly, at high welding speed (4 m/min). Porosity was prevented by accurate cleaning of the base metal prior to welding and optimizing the flow rate of argon shielding gas. Solidification cracking was avoided through two different approaches. The first one is based on the addition of filler metal as reported in other research works. The other new approach is concerned with autogeneous welding using a backing strip from the same base metal, and this could be applicable in production. Preventing solidification cracking in both cases was related mainly to a considerable decrease in the stress concentration at the weld metal center as a result of improving the fusion zone profile. The implementation of the new approach could help in producing weldments with a better quality due to the absence of the filler metal, which is known as a source for hydrogen-related porosity. It can also have a positive economic aspect concerning the manufacturing cost since welding is done without the addition of filler metal. Not only quality and economic positive aspects could be achieved, but also high productivity is another feature since high quality autogeneous weldments were produced with high welding speed, 6 m/min. Hardness measurements and tensile test of AA6061 alloy welds indicated a remarkable softening of the fusion zone due to dissolution of the strengthening precipitates, and this was recovered by aging treatment after welding. For alloys AA5052 and AA5083, softening of the fusion zone due to the loss of its work-hardened condition was much less in comparison with AA6061 alloy.

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