A sub-0.5 ?m bilevel lithographic process using the deep-UV electron-beam resist p(si-cms)

1989 ◽  
Vol 29 (14) ◽  
pp. 920-927 ◽  
Author(s):  
A. E. Novembre ◽  
M. J. Jurek ◽  
A. Kornblit ◽  
E. Reichmanis
Keyword(s):  
Electron Beam ◽  
Deep Uv

scholarly journals A Comparative Study of Deep-UV Thin Resist by Electron Beam Stabilization.

2000 ◽  
Vol 13 (4) ◽  
pp. 497-502
Author(s):  
Myoung-Soo Kim ◽  
Dong-Heok Park ◽  
Min-Sub Han ◽  
Hak-Joon Kim ◽  
Myung-Goon Gil ◽  
...  
Keyword(s):  
Electron Beam ◽  
Comparative Study ◽  
Deep Uv

Characteristic study of electron beam stabilization for deep-UV photoresists

2000 ◽  
Author(s):  
Myoung-Soo Kim ◽  
Jae-Hak Choi ◽  
Chi H. Rho ◽  
Min-Jong Hong ◽  
Bum-Jin Jun ◽  
...  
Keyword(s):  
Electron Beam ◽  
Deep Uv

Comparison of the lithographic characteristics of t-BOC-based chemically amplified resist system under deep-UV and electron-beam exposures

1994 ◽  
Author(s):  
Regine G. Tarascon-Auriol ◽  
Anthony E. Novembre ◽  
Woon W. Tai ◽  
Linus A. Fetter ◽  
Janet M. Kometani ◽  
...  
Keyword(s):  
Electron Beam ◽  
Chemically Amplified ◽  
Chemically Amplified Resist ◽  
Deep Uv

New high resolution and high sensitivity deep UV, x-ray, and electron beam resists

1990 ◽  
Vol 11 (1-4) ◽  
pp. 487-489 ◽  
Author(s):  
Michael Hatzakis ◽  
Kevin J. Stewart ◽  
Jane M. Shaw ◽  
Stephen A. Rishton
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
High Sensitivity ◽  
X Ray ◽  
Deep Uv

Alkali-Developable Silicone-Based Negative Photoresist (SNP) for Deep UV, Electron Beam, and X-Ray Lithographies

1989 ◽  
Vol 28 (Part 2, No. 10) ◽  
pp. L1863-L1865 ◽  
Author(s):  
Hiroshi Ban ◽  
Akinobu Tanaka ◽  
Yoshio Kawai ◽  
Kimiyoshi Deguchi
Keyword(s):  
Electron Beam ◽  
Negative Photoresist ◽  
X Ray ◽  
Deep Uv

Bis(perfluorophenyl)azides: efficient crosslinking agents for deep-UV and electron beam lithography

1990 ◽  
Vol 2 (6) ◽  
pp. 631-633 ◽  
Author(s):  
Sui Xiong Cai ◽  
J. C. Nabity ◽  
M. N. Wybourne ◽  
John F. W. Keana
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Deep Uv ◽  
Crosslinking Agents
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