Novel Top-Surface Imaging Process by Selective Chemisorption of Poly(dimethyl siloxane) on Diazoketo-Functionalized Single Component Photoresist

2008 ◽  
Vol 29 (5) ◽  
pp. 437-441 ◽  
Author(s):  
Ramakrishnan Ganesan ◽  
Seul-Ki Youn ◽  
Jin-Baek Kim
Keyword(s):  
Single Component ◽  
Surface Imaging ◽  
Dimethyl Siloxane ◽  
Top Surface Imaging

Lithographic and chemical contrast of single-component top-surface imaging (TSI) resists

1998 ◽  
Author(s):  
John F. Bohland ◽  
Janet Chambers ◽  
Siddhartha Das ◽  
Theodore H. Fedynyshyn ◽  
Susan M. Holl ◽  
...  
Keyword(s):  
Single Component ◽  
Surface Imaging ◽  
Top Surface Imaging

A Study of the O2-SO2Plasma Etch Chemistry for Top Surface Imaging Photoresist Dry Development

1998 ◽  
Vol 37 (Part 1, No. 4B) ◽  
pp. 2373-2380 ◽  
Author(s):  
Z. S. Huang ◽  
Yosias Melaku ◽  
Wendy Nguyen
Keyword(s):  
Surface Imaging ◽  
Top Surface Imaging

Top-Surface Imaging Using Selective Electroless Metallization of Patterned Monolayer Films

1993 ◽  
pp. 210-219 ◽  
Author(s):  
J. M. Calvert ◽  
W. J. Dressick ◽  
C. S. Dulcey ◽  
M. S. Chen ◽  
J. H. Georger ◽  
...  
Keyword(s):  
Surface Imaging ◽  
Monolayer Films ◽  
Electroless Metallization ◽  
Top Surface Imaging

Using alicyclic polymers in top surface imaging systems to reduce line-edge roughness

2000 ◽  
Author(s):  
Mark H. Somervell ◽  
David S. Fryer ◽  
Brian Osborn ◽  
Kyle Patterson ◽  
Sungseo Cho ◽  
...  
Keyword(s):  
Imaging Systems ◽  
Surface Imaging ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
Top Surface Imaging

scholarly journals Top Surface Imaging for Extreme Ultraviolet Lithography.

1998 ◽  
Vol 11 (3) ◽  
pp. 459-464 ◽  
Author(s):  
Craig Henderson ◽  
David Wheeler ◽  
Timothy Pollagi ◽  
Greg Cardinale ◽  
Donna O'Connell ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Surface Imaging ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Top Surface Imaging

Electrical property study of line-edge roughness in top surface imaging process by silylation

1999 ◽  
Author(s):  
Myoung-Soo Kim ◽  
Hyoung-Gi Kim ◽  
Seung Ho Pyi ◽  
Hyeong-Soo Kim ◽  
Ki-Ho Baik ◽  
...  
Keyword(s):  
Electrical Property ◽  
Surface Imaging ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
Top Surface Imaging
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