Molecular Dynamics Simulations of the Growth of Thin A-C:H Films Under Additional Ion Bombardment: Influence of the Growth Species and the Ar+ Ion Kinetic Energy
2007 ◽
Vol 13
(6-7)
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pp. 312-318
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Keyword(s):
1998 ◽
Vol 16
(5)
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pp. 3006-3019
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Keyword(s):
2004 ◽
Vol 30
(6)
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pp. 379-385
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Keyword(s):
1976 ◽
Vol 31
(9)
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pp. 1068-1072
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2003 ◽
Vol 212
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pp. 369-375
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2008 ◽
Vol 26
(2)
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pp. 274-280
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