Growth of Praseodymium Oxide and Praseodymium Silicate Thin Films by Liquid Injection MOCVD

2004 ◽  
Vol 10 (2) ◽  
pp. 83-89 ◽  
Author(s):  
H.C. Aspinall ◽  
J. Gaskell ◽  
P.A. Williams ◽  
A.C. Jones ◽  
P.R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Praseodymium Oxide ◽  
Liquid Injection

Liquid Injection MOCVD of Rare-Earth Oxides Using New Alkoxide Precursors

2003 ◽  
Vol 784 ◽  
Author(s):  
Paul A. Williams ◽  
Anthony C. Jones ◽  
Helen C. Aspinall ◽  
Jeffrey M. Gaskell ◽  
Paul R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Rare Earth ◽  
Lanthanum Oxide ◽  
Molecular Aggregation ◽  
Praseodymium Oxide ◽  
H Nmr ◽  
Liquid Injection ◽  
Solution Studies ◽  
Alkoxide Precursors ◽  
Donor Species

ABSTRACTHigh purity lanthanum oxide and praseodymium oxide thin films (C< 1 at.-%) have been deposited by liquid injection MOCVD using the volatile alkoxide precursos [La(mmp)3] and [Pr(mmp)3] in toluene-solution (mmp = OCMe2CH2OMe). 1H NMR solution studies have shown that the addition of donor species, such as tetraglyme (CH3O(CH2CH2O)4CH3) or mmpH prevent molecular aggregation and help stabilise the precursors.

Growth of Praseodymium Oxide Thin Films by Liquid Injection MOCVD Using a Novel Praseodymium Alkoxide Precursor.

ChemInform ◽  
2003 ◽  
Vol 34 (52) ◽  
Author(s):  
Helen C. Aspinall ◽  
Jeffrey Gaskell ◽  
Paul A. Williams ◽  
Anthony C. Jones ◽  
Paul R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Oxide Thin Films ◽  
Praseodymium Oxide ◽  
Liquid Injection ◽  
Alkoxide Precursor

Growth of Praseodymium Oxide Thin Films by Liquid Injection MOCVD Using a Novel Praseodymium Alkoxide Precursor

2003 ◽  
Vol 9 (5) ◽  
pp. 235-238 ◽  
Author(s):  
H.C. Aspinall ◽  
J. Gaskell ◽  
P.A. Williams ◽  
A.C. Jones ◽  
P.R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Oxide Thin Films ◽  
Praseodymium Oxide ◽  
Liquid Injection ◽  
Alkoxide Precursor

Growth of Praseodymium Oxide and Praseodymium Silicate Thin Films by Liquid Injection MOCVD.

ChemInform ◽  
2004 ◽  
Vol 35 (22) ◽  
Author(s):  
Helen C. Aspinall ◽  
Jeffrey Gaskell ◽  
Paul A. Williams ◽  
Anthony C. Jones ◽  
Paul R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Praseodymium Oxide ◽  
Liquid Injection

Liquid Injection MOCVD of Rare-Earth Oxides Using New Alkoxide Precursors

2003 ◽  
Vol 786 ◽  
Author(s):  
Paul A. Williams ◽  
Anthony C. Jones ◽  
Helen C. Aspinall ◽  
Jeffrey M. Gaskell ◽  
Paul R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Rare Earth ◽  
Lanthanum Oxide ◽  
Molecular Aggregation ◽  
Praseodymium Oxide ◽  
H Nmr ◽  
Liquid Injection ◽  
Solution Studies ◽  
Alkoxide Precursors ◽  
Donor Species

ABSTRACTHigh purity lanthanum oxide and praseodymium oxide thin films (C< 1 at.-%) have been deposited by liquid injection MOCVD using the volatile alkoxide precursos [La(mmp)3] and [Pr(mmp)3] in toluene-solution (mmp = OCMe2CH2OMe). 1H NMR solution studies have shown that the addition of donor species, such as tetraglyme (CH3O(CH2CH2O)4CH3) or mmpH prevent molecular aggregation and help stabilise the precursors.

A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films

2017 ◽  
Vol 19 (8) ◽  
pp. 1700193 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection

Growth of Lanthanum Oxide Thin Films by Liquid Injection MOCVD Using a Novel Lathanum Alkoxide Precursor

2004 ◽  
Vol 10 (1) ◽  
pp. 13-17 ◽  
Author(s):  
H.C. Aspinall ◽  
J. Gaskell ◽  
P.A. Williams ◽  
A.C. Jones ◽  
P.R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Lanthanum Oxide ◽  
Oxide Thin Films ◽  
Liquid Injection ◽  
Alkoxide Precursor

The quest towards epitaxial BaMgF4 thin films: exploring MOCVD as a chemical scalable approach for the deposition of complex metal fluoride films

2016 ◽  
Vol 45 (44) ◽  
pp. 17833-17842 ◽  
Author(s):  
Sergio Battiato ◽  
Jean-Luc Deschanvres ◽  
Hervé Roussel ◽  
Laetitia Rapenne ◽  
Béatrice Doisneau ◽  
...  
Keyword(s):  
Thin Films ◽  
Metal Fluoride ◽  
Complex Metal ◽  
Liquid Injection ◽  
Synthetic Routes

Conventional and Liquid Injection MOCVD have been explored as synthetic routes for the growth of BaMgF4 films on SrTiO3 (001) substrates.

Sign in / Sign up

Export Citation Format

Share Document