The quest towards epitaxial BaMgF4 thin films: exploring MOCVD as a chemical scalable approach for the deposition of complex metal fluoride films

2016 ◽  
Vol 45 (44) ◽  
pp. 17833-17842 ◽  
Author(s):  
Sergio Battiato ◽  
Jean-Luc Deschanvres ◽  
Hervé Roussel ◽  
Laetitia Rapenne ◽  
Béatrice Doisneau ◽  
...  
Keyword(s):  
Thin Films ◽  
Metal Fluoride ◽  
Complex Metal ◽  
Liquid Injection ◽  
Synthetic Routes

Conventional and Liquid Injection MOCVD have been explored as synthetic routes for the growth of BaMgF4 films on SrTiO3 (001) substrates.

A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films

2017 ◽  
Vol 19 (8) ◽  
pp. 1700193 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection

Growth of Lanthanum Oxide Thin Films by Liquid Injection MOCVD Using a Novel Lathanum Alkoxide Precursor

2004 ◽  
Vol 10 (1) ◽  
pp. 13-17 ◽  
Author(s):  
H.C. Aspinall ◽  
J. Gaskell ◽  
P.A. Williams ◽  
A.C. Jones ◽  
P.R. Chalker ◽  
...  
Keyword(s):  
Thin Films ◽  
Lanthanum Oxide ◽  
Oxide Thin Films ◽  
Liquid Injection ◽  
Alkoxide Precursor

Novel Synthetic Routes to Carbon-Nitrogen Thin Films

1994 ◽  
Vol 6 (6) ◽  
pp. 811-814 ◽  
Author(s):  
J. Kouvetakis ◽  
Michael Todd ◽  
Barry Wilkens ◽  
Anil Bandari ◽  
Nigel Cave
Keyword(s):  
Thin Films ◽  
Synthetic Routes

scholarly journals Chemical vapor deposition of Ru thin films by direct liquid injection of Ru(OD)[sub 3] (OD=octanedionate)

2000 ◽  
Vol 18 (5) ◽  
pp. 2400 ◽  
Author(s):  
Jung-Hyun Lee ◽  
Joo-Young Kim ◽  
Shi-Woo Rhee ◽  
DooYoung Yang ◽  
Dong-Hyun Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Liquid Injection ◽  
Direct Liquid Injection
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