Atomic Layer Deposition of Hafnium Dioxide Films from Hafnium Hydroxylamide and Water

2004 ◽  
Vol 10 (2) ◽  
pp. 91-96 ◽  
Author(s):  
K. Kukli ◽  
M. Ritala ◽  
M. Leskelä ◽  
T. Sajavaara ◽  
J. Keinonen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Hafnium Dioxide ◽  
Layer Deposition

scholarly journals Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials

Crystals ◽  
2020 ◽  
Vol 10 (2) ◽  
pp. 136 ◽  
Author(s):  
Zhigang Xiao ◽  
Kim Kisslinger ◽  
Sam Chance ◽  
Samuel Banks
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Dioxide ◽  
Atomic Layer ◽  
Gate Oxide ◽  
Hafnium Dioxide ◽  
Metal Oxide Semiconductor ◽  
Oxide Semiconductor ◽  
X Ray ◽  
Layer Deposition

We report the growth of nanoscale hafnium dioxide (HfO2) and zirconium dioxide (ZrO2) thin films using remote plasma-enhanced atomic layer deposition (PE-ALD), and the fabrication of complementary metal-oxide semiconductor (CMOS) integrated circuits using the HfO2 and ZrO2 thin films as the gate oxide. Tetrakis (dimethylamino) hafnium (Hf[N(CH3)2]4) and tetrakis (dimethylamino) zirconium (IV) (Zr[N(CH3)2]4) were used as the precursors, while O2 gas was used as the reactive gas. The PE-ALD-grown HfO2 and ZrO2 thin films were analyzed using X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and high-resolution transmission electron microscopy (HRTEM). The XPS measurements show that the ZrO2 film has the atomic concentrations of 34% Zr, 2% C, and 64% O while the HfO2 film has the atomic concentrations of 29% Hf, 11% C, and 60% O. The HRTEM and XRD measurements show both HfO2 and ZrO2 films have polycrystalline structures. n-channel and p-channel metal-oxide semiconductor field-effect transistors (nFETs and pFETs), CMOS inverters, and CMOS ring oscillators were fabricated to test the quality of the HfO2 and ZrO2 thin films as the gate oxide. Current-voltage (IV) curves, transfer characteristics, and oscillation waveforms were measured from the fabricated transistors, inverters, and oscillators, respectively. The experimental results measured from the HfO2 and ZrO2 thin films were compared.

VERTICAL SILICON NANOWIRES WITH ATOMIC LAYER DEPOSITION WITH HfO2 MEMBRANE FOR pH SENSING APPLICATION

2011 ◽  
Vol 11 (05) ◽  
pp. 959-966 ◽  
Author(s):  
YI-TING LIN ◽  
YU-HONG YU ◽  
YU CHEN ◽  
GUO-JUN ZHANG ◽  
SHI-YANG ZHU ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Silicon Nanowires ◽  
Atomic Layer ◽  
Hafnium Dioxide ◽  
Hydrogen Ion ◽  
Ion Concentration ◽  
Hydrogen Ion Concentration ◽  
Sensing Properties ◽  
Layer Deposition ◽  
Sensing Membrane

Vertical silicon nanowire (SiNW) platforms are candidates for use in ultrasensitive biosensors, with surface-to-volume ratio higher than one-dimensional SiNW . In this paper, a vertical SiNW electrolyte–insulator–semiconductor (EIS) structure with an ALD-HfO2 sensing membrane is proposed for use in a hydrogen ion sensor. Hafnium dioxide is used as the sensing membrane, which was deposited on the surface of the vertical SiNW structure by atomic layer deposition. The sensing properties were examined using a HP4284A high-precision LCR analyzer. A linear relationship was found between the flatband voltage shift and the hydrogen ion concentration. Comparing with different diameters of SiNW , the sensitivity with diameter of 200 nm was slightly higher than 100 nm. A post-deposition rapid thermal annealing (RTA) was utilized to optimize the sensing properties, and the sensitivity was increased to 51.07 mV/pH.

Tribological study of hafnium dioxide and aluminium oxide films grown by atomic layer deposition on glass substrate

2020 ◽  
Vol 709 ◽  
pp. 138191
Author(s):  
R. Pietruszka ◽  
B.S. Witkowski ◽  
S. Zimowski ◽  
T. Stapinski ◽  
M. Godlewski
Keyword(s):  
Atomic Layer Deposition ◽  
Glass Substrate ◽  
Oxide Films ◽  
Aluminium Oxide ◽  
Atomic Layer ◽  
Hafnium Dioxide ◽  
Tribological Study ◽  
Layer Deposition

Hafnium dioxide as a passivating layer and diffusive barrier in ZnO/Ag Schottky junctions obtained by atomic layer deposition

2011 ◽  
Vol 98 (26) ◽  
pp. 263502 ◽  
Author(s):  
Tomasz A. Krajewski ◽  
Grzegorz Luka ◽  
Sylwia Gieraltowska ◽  
Adam J. Zakrzewski ◽  
Petro S. Smertenko ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Hafnium Dioxide ◽  
Passivating Layer ◽  
Layer Deposition ◽  
Schottky Junctions

Investigation of Self-Assembled Monolayer Resists for Hafnium Dioxide Atomic Layer Deposition

2005 ◽  
Vol 17 (3) ◽  
pp. 536-544 ◽  
Author(s):  
Rong Chen ◽  
Hyoungsub Kim ◽  
Paul C. McIntyre ◽  
Stacey F. Bent
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Hafnium Dioxide ◽  
Self Assembled Monolayer ◽  
Layer Deposition ◽  
Self Assembled

Atomic Layer Deposition of Hafnium Dioxide Films from 1-Methoxy-2-methyl-2-propanolate Complex of Hafnium

2003 ◽  
Vol 15 (8) ◽  
pp. 1722-1727 ◽  
Author(s):  
Kaupo Kukli ◽  
Mikko Ritala ◽  
Markku Leskelä ◽  
Timo Sajavaara ◽  
Juhani Keinonen ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Hafnium Dioxide ◽  
Layer Deposition

XPS and AFM investigation of hafnium dioxide thin films prepared by atomic layer deposition on silicon

2007 ◽  
Vol 156-158 ◽  
pp. 150-154 ◽  
Author(s):  
V. Sammelselg ◽  
R. Rammula ◽  
J. Aarik ◽  
A. Kikas ◽  
K. Kooser ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Hafnium Dioxide ◽  
Layer Deposition
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