Prospects of Phase Resolved Optical Emission Spectroscopy as a Powerful Diagnostic Tool for RF-Discharges
2004 ◽
Vol 44
(56)
◽
pp. 523-528
◽
1997 ◽
Vol 17
(2)
◽
pp. 181-192
◽
Keyword(s):
1986 ◽
Vol 84
(5)
◽
pp. 2668-2674
◽
2000 ◽
Vol 39
(Part 1, No. 2A)
◽
pp. 555-559
◽
Keyword(s):
2016 ◽
2018 ◽