Quantitative Studies of Glow-Discharge Deposition Using Optical Emission Spectroscopy
Keyword(s):
AbstractIntensities of CH optical emission and electrical properties of methane rf discharges as a function of pressure are presented and discussed. The results are consistent with a model in which the properties of the discharge are dominated by secondary electrons traversing the gap between the electrodes.
2010 ◽
Vol 65
(7)
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pp. 533-541
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2018 ◽
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pp. 412-416
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2017 ◽
Vol 32
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pp. 931-941
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2019 ◽
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pp. 99-106
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2012 ◽
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2006 ◽
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pp. 301-309
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