Hydrocarbon Incorporation Effect on the Electrical Properties of Low Dielectric Constant SiCOH Films Deposited with Tetrakis(trimethylsilyloxy)silane and Cyclohexane Precursors

2015 ◽  
Vol 36 (11) ◽  
pp. 2677-2681
Author(s):  
Hoonbae Kim ◽  
Wontak Kang ◽  
Hyun-Jin Seo ◽  
Donggeun Jung ◽  
Jin-Hyo Boo
Keyword(s):  
Dielectric Constant ◽  
Electrical Properties ◽  
Low Dielectric Constant ◽  
Low Dielectric

Electrical properties of low-dielectric-constant films prepared by PECVD in O2/CH4/HMDSO

2002 ◽  
Vol 5 (2-3) ◽  
pp. 279-284 ◽  
Author(s):  
G Borvon ◽  
A Goullet ◽  
X Mellhaoui ◽  
N Charrouf ◽  
A Granier
Keyword(s):  
Dielectric Constant ◽  
Electrical Properties ◽  
Low Dielectric Constant ◽  
Low Dielectric

A New Low Dielectric Constant Polymer Material (k < 2): Microstructure, Electrical Properties, and Mechanical Properties

1999 ◽  
Vol 565 ◽  
Author(s):  
Yi-Pin Tsai ◽  
C. N. Liao ◽  
Yuhuan Xu ◽  
K. N. Tu ◽  
Bin Zhao ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Dielectric Constant ◽  
Electrical Properties ◽  
Pore Size ◽  
Leakage Current ◽  
Polymer Material ◽  
Porous Polymer ◽  
Low Dielectric Constant ◽  
Two Phase ◽  
Low Dielectric

AbstractA porous polymer material, which is made of a two-phase composite and contains 35% porosity with a pore size less than 50Å, is found to have a dielectric constant of 1.8. It absorbs almost no water. The electrical properties, such as capacitance and leakage current, do not change with time and temperature.

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