scholarly journals Optical Inspection of 2D Materials: From Mechanical Exfoliation to Wafer‐Scale Growth and Beyond

2021 ◽  
pp. 2102128
Author(s):  
Yang‐Chun Lee ◽  
Sih‐Wei Chang ◽  
Shu‐Hsien Chen ◽  
Shau‐Liang Chen ◽  
Hsuen‐Li Chen
Keyword(s):  
2D Materials ◽  
Scale Growth ◽  
Mechanical Exfoliation ◽  
Wafer Scale ◽  
Optical Inspection

Wafer-Scale Growth of ITO Nanorods by Radio Frequency Magnetron Sputtering Deposition

2011 ◽  
Vol 158 (5) ◽  
pp. K131 ◽  
Author(s):  
Jae Hyoung Park ◽  
Hoo Keun Park ◽  
Jinhoo Jeong ◽  
Woong Kim ◽  
Byoung Koun Min ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Scale Growth ◽  
Sputtering Deposition ◽  
Wafer Scale

scholarly journals Wafer Scale Growth and Characterization of Edge Specific Graphene Nanoribbons for Nanoelectronics

2018 ◽  
Vol 2 (1) ◽  
pp. 156-162 ◽  
Author(s):  
Alexei A. Zakharov ◽  
Nikolay A. Vinogradov ◽  
Johannes Aprojanz ◽  
Thi Thuy Nhung Nguyen ◽  
Christoph Tegenkamp ◽  
...  
Keyword(s):  
Graphene Nanoribbons ◽  
Scale Growth ◽  
Wafer Scale

Wafer-Scale Growth of Pristine and Doped Monolayer MoS2 Films for Electronic Device Applications

2020 ◽  
Vol 59 (23) ◽  
pp. 17356-17363
Author(s):  
Dongsheng Wang ◽  
Yue Zhou ◽  
Hao Zhang ◽  
Rufan Zhang ◽  
Haoyu Dong ◽  
...  
Keyword(s):  
Electronic Device ◽  
Monolayer Mos2 ◽  
Scale Growth ◽  
Wafer Scale ◽  
Device Applications

Wafer-Scale Growth of Single-Crystal 2D Semiconductor on Perovskite Oxides for High-Performance Transistors

Nano Letters ◽  
2019 ◽  
Vol 19 (3) ◽  
pp. 2148-2153 ◽  
Author(s):  
Congwei Tan ◽  
Min Tang ◽  
Jinxiong Wu ◽  
Yinan Liu ◽  
Tianran Li ◽  
...  
Keyword(s):  
Single Crystal ◽  
High Performance ◽  
Perovskite Oxides ◽  
Scale Growth ◽  
Wafer Scale

Wafer-scale growth of MoS2thin films by atomic layer deposition

Nanoscale ◽  
2016 ◽  
Vol 8 (20) ◽  
pp. 10792-10798 ◽  
Author(s):  
Jung Joon Pyeon ◽  
Soo Hyun Kim ◽  
Doo Seok Jeong ◽  
Seung-Hyub Baek ◽  
Chong-Yun Kang ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Scale Growth ◽  
Wafer Scale ◽  
Layer Deposition

Wafer-scale growth of single-crystal graphene on vicinal Ge(001) substrate

Nano Today ◽  
2020 ◽  
Vol 34 ◽  
pp. 100908
Author(s):  
Panlin Li ◽  
Wenya Wei ◽  
Miao Zhang ◽  
Yongfeng Mei ◽  
Paul K. Chu ◽  
...  
Keyword(s):  
Single Crystal ◽  
Scale Growth ◽  
Wafer Scale

scholarly journals Atomically thin three-dimensional membranes of van der Waals semiconductors by wafer-scale growth

2019 ◽  
Vol 5 (7) ◽  
pp. eaaw3180 ◽  
Author(s):  
Gangtae Jin ◽  
Chang-Soo Lee ◽  
Xing Liao ◽  
Juho Kim ◽  
Zhen Wang ◽  
...  
Keyword(s):  
Van Der Waals ◽  
Three Dimensional ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Semiconductor Films ◽  
Scale Growth ◽  
Wafer Scale ◽  
Equilibrium Limit ◽  
Si Substrates ◽  
3D Texture

We report wafer-scale growth of atomically thin, three-dimensional (3D) van der Waals (vdW) semiconductor membranes. By controlling the growth kinetics in the near-equilibrium limit during metal-organic chemical vapor depositions of MoS2 and WS2 monolayer (ML) crystals, we have achieved conformal ML coverage on diverse 3D texture substrates, such as periodic arrays of nanoscale needles and trenches on quartz and SiO2/Si substrates. The ML semiconductor properties, such as channel resistivity and photoluminescence, are verified to be seamlessly uniform over the 3D textures and are scalable to wafer scale. In addition, we demonstrated that these 3D films can be easily delaminated from the growth substrates to form suspended 3D semiconductor membranes. Our work suggests that vdW ML semiconductor films can be useful platforms for patchable membrane electronics with atomic precision, yet large areas, on arbitrary substrates.

Simple Wafer-Scale Growth and Transfer of Graphene Film Converted from Spin-Coated Fullerene Derivative

2012 ◽  
Vol 2 (2) ◽  
pp. M13-M16 ◽  
Author(s):  
J. Hoon Seo ◽  
J.-W. Kang ◽  
D.-H. Kim ◽  
S. Jo ◽  
S. Yoon Ryu ◽  
...  
Keyword(s):  
Graphene Film ◽  
Fullerene Derivative ◽  
Scale Growth ◽  
Wafer Scale

Wafer-Scale Growth and Transfer of Aligned Single-Walled Carbon Nanotubes

2009 ◽  
Vol 8 (4) ◽  
pp. 498-504 ◽  
Author(s):  
N. Patil ◽  
A. Lin ◽  
E.R. Myers ◽  
Koungmin Ryu ◽  
A. Badmaev ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Single Walled Carbon Nanotubes ◽  
Scale Growth ◽  
Wafer Scale ◽  
Single Walled Carbon ◽  
Walled Carbon Nanotubes

scholarly journals Wafer-scale growth of VO2 thin films using a combinatorial approach

2015 ◽  
Vol 6 (1) ◽  
Author(s):  
Hai-Tian Zhang ◽  
Lei Zhang ◽  
Debangshu Mukherjee ◽  
Yuan-Xia Zheng ◽  
Ryan C. Haislmaier ◽  
...  
Keyword(s):  
Thin Films ◽  
Combinatorial Approach ◽  
Scale Growth ◽  
Wafer Scale ◽  
Vo2 Thin Films
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