Kinetics and Mechanism of Atomic Force Microscope Local Oxidation on Hydrogen-Passivated Silicon in Inert Organic Solvents

2006 ◽  
Vol 18 (11) ◽  
pp. 1377-1380 ◽  
Author(s):  
C. R. Kinser ◽  
M. J. Schmitz ◽  
M. C. Hersam
Keyword(s):  
Atomic Force Microscope ◽  
Organic Solvents ◽  
Kinetics And Mechanism ◽  
Atomic Force ◽  
Local Oxidation ◽  
Passivated Silicon

Conductive Atomic Force Microscope Nanopatterning of Hydrogen-Passivated Silicon in Inert Organic Solvents

Nano Letters ◽  
2005 ◽  
Vol 5 (1) ◽  
pp. 91-95 ◽  
Author(s):  
C. Reagan Kinser ◽  
Matthew J. Schmitz ◽  
Mark C. Hersam
Keyword(s):  
Atomic Force Microscope ◽  
Organic Solvents ◽  
Atomic Force ◽  
Passivated Silicon

Superconducting single photon detectors made by local oxidation with an atomic force microscope

2007 ◽  
Vol 90 (19) ◽  
pp. 191116 ◽  
Author(s):  
C. Delacour ◽  
J. Claudon ◽  
J.-Ph. Poizat ◽  
B. Pannetier ◽  
V. Bouchiat ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Single Photon ◽  
Photon Detectors ◽  
Atomic Force ◽  
Local Oxidation ◽  
Single Photon Detectors

Spm Based Lithography for Nanometer Scale Electrodes Fabrication

1999 ◽  
Vol 584 ◽  
Author(s):  
A. Notargiacomo ◽  
E. Giovine ◽  
E. Cianci ◽  
V. Foglietti ◽  
F. Evangelisti
Keyword(s):  
Atomic Force Microscope ◽  
Material Removal ◽  
Low Cost ◽  
Metal Electrode ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Quantum Devices ◽  
Positioning Accuracy ◽  
Atomic Force ◽  
Local Oxidation

AbstractScanning probe assisted nanolithography is a very attractive technique in terms of low-cost, patterning resolution and positioning accuracy. Our approach makes use of a commercial atomic force microscope and silicon probes to build simple nanostructures, such as metal electrode pairs, for application in novel quantum devices.Sub-100 nm patterning was successfully performed using three different techniques: direct material removal, scanning probe assisted mask patterning and local oxidation.

Effect of Solvent and Dopant on Poly(3,4-ethylenedioxythiophene) Thin Films by Atomic Force Microscope Lithography

2008 ◽  
Vol 8 (9) ◽  
pp. 4757-4760 ◽  
Author(s):  
Yong-il Kim ◽  
Hyunsook Kim ◽  
Haiwon Lee
Keyword(s):  
Thin Films ◽  
Conducting Polymers ◽  
Atomic Force Microscope ◽  
Organic Solvents ◽  
Silicon Surface ◽  
Silicon Oxide ◽  
Organic Thin Films ◽  
Effect Of Solvent ◽  
Aspect Ratios ◽  
Atomic Force

AMF anodization lithography was performed on organic thin films with conducting polymers which is poly(3,4-ethylenedioxythiophene). The conductivity of PEDOT thin films was changed by different dopants and organic solvents. Two different dopants are poly(4-styrenesulfonate) and di(2-ethylhexyl)-sulfosuccinate. Also, DMF and IPA were used to prepare the PEDOT thin films doped with PSS and DEHS on silicon surface. The conductivities of these PEDOT variants were compared by obtaining their I–V curves between tip and thin films using AFM. Silicon oxide nanopatterns with higher aspect ratios can be obtained from the films with higher conductivity.

Photo-assisted local oxidation of GaN using an atomic force microscope

2006 ◽  
Vol 17 (13) ◽  
pp. 3299-3303 ◽  
Author(s):  
Jih Shang Hwang ◽  
Zhan Shuo Hu ◽  
Ton Yuan Lu ◽  
Li Wei Chen ◽  
Shi Wei Chen ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Atomic Force ◽  
Local Oxidation

Local oxidation of InN and GaN using an atomic force microscope

2006 ◽  
Vol 17 (3) ◽  
pp. 859-863 ◽  
Author(s):  
Jih Shang Hwang ◽  
Zhan Shuo Hu ◽  
Zen Yu You ◽  
Tai Yuan Lin ◽  
Chin Lian Hsiao ◽  
...  
Keyword(s):  
Atomic Force Microscope ◽  
Atomic Force ◽  
Local Oxidation

Measurement of Reaction Current during Atomic Force Microscope Local Oxidation of Conductive Surfaces Capped with Insulating Layers

2008 ◽  
Vol 47 (1) ◽  
pp. 768-770
Author(s):  
Yasuyuki Shimada ◽  
Tsutomu Yamada ◽  
Jun-ichi Shirakashi ◽  
Yasushi Takemura
Keyword(s):  
Atomic Force Microscope ◽  
Atomic Force ◽  
Local Oxidation ◽  
Conductive Surfaces

scholarly journals Atomic force microscope local oxidation nanolithography of graphene

2008 ◽  
Vol 93 (9) ◽  
pp. 093107 ◽  
Author(s):  
Lishan Weng ◽  
Liyuan Zhang ◽  
Yong P. Chen ◽  
L. P. Rokhinson
Keyword(s):  
Atomic Force Microscope ◽  
Atomic Force ◽  
Local Oxidation
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