Vital volumes. Characterization of materials, part II. Edited byE. Lifshin, Vol. 2 B ofMaterials science and technology?A comprehensive treatment, edited byR. W. Cahn,P. Haasen, andE. J. Kramer, VCH, weinheim 1994, XVII, 775 pp., DM 450.00, ISBN 3-527-28265-3

1994 ◽  
Vol 6 (10) ◽  
pp. 805-806
Author(s):  
Harald Hantsche
Keyword(s):  
Science And Technology ◽  
Comprehensive Treatment ◽  
Characterization Of Materials

Nanoscale Characterization of Materials

MRS Bulletin ◽  
1997 ◽  
Vol 22 (8) ◽  
pp. 17-21 ◽  
Author(s):  
Edward T. Yu ◽  
Stephen J. Pennycook
Keyword(s):  
Electron Microscopy ◽  
Materials Science ◽  
Experimental Techniques ◽  
Nanometer Scale ◽  
Comprehensive Treatment ◽  
Major Theme ◽  
Wide Range ◽  
Materials Research ◽  
Characterization Of Materials

One of the dominant trends in current research in materials science and related fields is the fabrication, characterization, and application of materials and device structures whose characteristic feature sizes are at or near the nanometer scale. Achieving an understanding of—and ultimately control over—the properties and behavior of a wide range of materials at the nanometer scale has therefore become a major theme in materials research. As our ability to synthesize materials and fabricate structures in this size regime improves, effective characterization of materials at the nanometer scale will continue to increase in importance.Central to this activity are the development and application of effective experimental techniques for performing characterization of structural, electronic, magnetic, optical, and other properties of materials with nanometer-scale spatial resolution. Two classes of experimental methods have proven to be particularly effective: scanning-probe techniques and electron microscopy. In this issue of MRS Bulletin, we have included eight articles that illustrate the elucidation of various aspects of nanometer-scale material properties using advanced scanningprobe or electron-microscopy techniques. Because the range of both experimental techniques and applications is extremely broad—and rapidly increasing—our intent is to provide several examples rather than a comprehensive treatment of this extremely active and rapidly growing field of research.

Some applications of electron beam microanalysis techniques in VLSI process evaluation

1983 ◽  
Vol 41 ◽  
pp. 160-161
Author(s):  
Simon Thomas
Keyword(s):  
Integrated Circuits ◽  
Process Evaluation ◽  
Large Scale ◽  
Technology Development ◽  
Analytical Techniques ◽  
Successful Implementation ◽  
Analysis Of Failures ◽  
Characterization Of Materials ◽  
Circuits Vlsi

Trends in the technology development of very large scale integrated circuits (VLSI) have been in the direction of higher density of components with smaller dimensions. The scaling down of device dimensions has been not only laterally but also in depth. Such efforts in miniaturization bring with them new developments in materials and processing. Successful implementation of these efforts is, to a large extent, dependent on the proper understanding of the material properties, process technologies and reliability issues, through adequate analytical studies. The analytical instrumentation technology has, fortunately, kept pace with the basic requirements of devices with lateral dimensions in the micron/ submicron range and depths of the order of nonometers. Often, newer analytical techniques have emerged or the more conventional techniques have been adapted to meet the more stringent requirements. As such, a variety of analytical techniques are available today to aid an analyst in the efforts of VLSI process evaluation. Generally such analytical efforts are divided into the characterization of materials, evaluation of processing steps and the analysis of failures.

Applications of ultramicrotomy for materials characterization

1993 ◽  
Vol 51 ◽  
pp. 232-233
Author(s):  
R.T. Blackham ◽  
J.J. Haugh ◽  
C.W. Hughes ◽  
M.G. Burke
Keyword(s):  
Materials Science ◽  
Microstructural Analysis ◽  
Analytical Electron Microscopy ◽  
Austenitic Stainless Steels ◽  
Specimen Preparation ◽  
Preparation Technique ◽  
Thermally Induced ◽  
Radiation Induced ◽  
Characterization Of Materials

Essential to the characterization of materials using analytical electron microscopy (AEM) techniques is the specimen itself. Without suitable samples, detailed microstructural analysis is not possible. Ultramicrotomy, or diamond knife sectioning, is a well-known mechanical specimen preparation technique which has been gaining attention in the materials science area. Malis and co-workers and Glanvill have demonstrated the usefulness and applicability of this technique to the study of a wide variety of materials including Al alloys, composites, and semiconductors. Ultramicrotomed specimens have uniform thickness with relatively large electron-transparent areas which are suitable for AEM anaysis.Interface Analysis in Type 316 Austenitic Stainless Steel: STEM-EDS microanalysis of grain boundaries in austenitic stainless steels provides important information concerning the development of Cr-depleted zones which accompany M23C6 precipitation, and documentation of radiation induced segregation (RIS). Conventional methods of TEM sample preparation are suitable for the evaluation of thermally induced segregation, but neutron irradiated samples present a variety of problems in both the preparation and in the AEM analysis, in addition to the handling hazard.

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