Atomic Layer Deposition Assisted Pattern Multiplication of Block Copolymer Lithography for 5 nm Scale Nanopatterning

2014 ◽  
Vol 24 (27) ◽  
pp. 4343-4348 ◽  
Author(s):  
Hyoung-Seok Moon ◽  
Ju Young Kim ◽  
Hyeong Min Jin ◽  
Woo Jae Lee ◽  
Hyeon Jin Choi ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Block Copolymer Lithography ◽  
Copolymer Lithography

The fabrication of tunable nanoporous oxide surfaces by block copolymer lithography and atomic layer deposition

2011 ◽  
Vol 22 (33) ◽  
pp. 335303 ◽  
Author(s):  
A Andreozzi ◽  
L Lamagna ◽  
G Seguini ◽  
M Fanciulli ◽  
S Schamm-Chardon ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Surfaces ◽  
Layer Deposition ◽  
Block Copolymer Lithography ◽  
Copolymer Lithography

Circular Double-Patterning Lithography Using a Block Copolymer Template and Atomic Layer Deposition

2018 ◽  
Vol 5 (16) ◽  
pp. 1800054 ◽  
Author(s):  
Zhixin Wan ◽  
Ha Jin Lee ◽  
Hyun Gu Kim ◽  
Gyeong Cheon Jo ◽  
Woon Ik Park ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Double Patterning

Nanoporous gyroid metal oxides with controlled thickness and composition by atomic layer deposition from block copolymer templates

2016 ◽  
Vol 4 (4) ◽  
pp. 840-849 ◽  
Author(s):  
Wei-Chun Ma ◽  
Wei-Shiang Huang ◽  
Ching-Shun Ku ◽  
Rong-Ming Ho
Keyword(s):  
Mechanical Properties ◽  
Block Copolymer ◽  
Atomic Layer Deposition ◽  
Specific Surface ◽  
Metal Oxides ◽  
Atomic Layer ◽  
High Porosity ◽  
Large Specific Surface Area ◽  
Layer Deposition ◽  
Superior Mechanical Properties

Nanoporous gyroid metal oxides were fabricated with controlled tube thickness and composition by templated atomic layer deposition giving high porosity and large specific surface area as well as superior mechanical properties.

Formation of Titania/Silica Hybrid Nanowires Containing Linear Mesocage Arrays by Evaporation-Induced Block-Copolymer Self-Assembly and Atomic Layer Deposition

2007 ◽  
Vol 119 (36) ◽  
pp. 6953-6956 ◽  
Author(s):  
Xin Chen ◽  
Mato Knez ◽  
Andreas Berger ◽  
Kornelius Nielsch ◽  
Ulrich Gösele ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Atomic Layer Deposition ◽  
Self Assembly ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Silica Hybrid
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