Fundamental Principles of Optical Lithography
Latest Publications

TOTAL DOCUMENTS

15

(FIVE YEARS 0)

H-INDEX

1

(FIVE YEARS 0)

Published By John Wiley & Sons, Ltd

9780470723876, 9780470018934

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Appendix A: Glossary of Microlithographic Terms

Fundamental Principles of Optical Lithography ◽

10.1002/9780470723876.app1 ◽

2007 ◽

pp. 457-490 ◽

Cited By ~ 1

Download Full-text

Gradient-Based Lithographic Optimization: Using the Normalized Image Log-Slope

Fundamental Principles of Optical Lithography ◽

10.1002/9780470723876.ch9 ◽

2007 ◽

pp. 369-409

Keyword(s):

Gradient Based

Download Full-text

Conventional Resists: Exposure and Bake Chemistry

Fundamental Principles of Optical Lithography ◽

10.1002/9780470723876.ch5 ◽

2007 ◽

pp. 191-222 ◽

Cited By ~ 1

Download Full-text

Photoresist Development

Fundamental Principles of Optical Lithography ◽

10.1002/9780470723876.ch7 ◽

2007 ◽

pp. 257-296

Download Full-text

Chemically Amplified Resists: Exposure and Bake Chemistry

Fundamental Principles of Optical Lithography ◽

10.1002/9780470723876.ch6 ◽

2007 ◽

pp. 223-256 ◽

Cited By ~ 1

Keyword(s):

Chemically Amplified ◽

Chemically Amplified Resists

Download Full-text

Appendix B: Curl, Divergence, Gradient, Laplacian

Fundamental Principles of Optical Lithography ◽

10.1002/9780470723876.app2 ◽

2007 ◽

pp. 491-494

Download Full-text

Lithographic Control in Semiconductor Manufacturing

Fundamental Principles of Optical Lithography ◽

10.1002/9780470723876.ch8 ◽

2007 ◽

pp. 297-368 ◽

Cited By ~ 1

Keyword(s):

Semiconductor Manufacturing

Download Full-text

Front Matter

Fundamental Principles of Optical Lithography ◽

10.1002/9780470723876.fmatter ◽

2007 ◽

pp. i-xvii

Download Full-text

Aerial Image Formation– The Details

Fundamental Principles of Optical Lithography ◽

10.1002/9780470723876.ch3 ◽

2007 ◽

pp. 75-128

Keyword(s):

Image Formation ◽

Aerial Image

Download Full-text

Aerial Image Formation– The Basics

Fundamental Principles of Optical Lithography ◽

10.1002/9780470723876.ch2 ◽

2007 ◽

pp. 29-74 ◽

Cited By ~ 1

Keyword(s):

Image Formation ◽

Aerial Image

Download Full-text