2006 IEEE International Symposium on Semiconductor Manufacturing
Latest Publications

TOTAL DOCUMENTS

161

(FIVE YEARS 0)

H-INDEX

(FIVE YEARS 0)

Published By IEEE

9784990413804

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Environmentally Friendly Single-Wafer Spin Cleaning Using Ultra-diluted HF/Nitrogen Jet Spray without Causing Structural Damage and Material Loss

2006 IEEE International Symposium on Semiconductor Manufacturing ◽

10.1109/issm.2006.4493051 ◽

2006 ◽

Author(s):

Hideki Hirano ◽

Kou Sato ◽

Tsutomu Osaka ◽

Hitoshi Kuniyasu ◽

Takeshi Hattori

Keyword(s):

Structural Damage ◽

Environmentally Friendly ◽

Material Loss

Download Full-text

Application of Atmospheric Plasma Abatement System for Exhausted Gas from MEMS Etching Process

2006 IEEE International Symposium on Semiconductor Manufacturing ◽

10.1109/issm.2006.4493017 ◽

2006 ◽

Cited By ~ 1

Author(s):

Kenji Hattori ◽

Kazuhiko Sakurai ◽

Nobuaki Watanabe ◽

Hirotaka Mangyou ◽

Satoshi Hasaka ◽

...

Keyword(s):

Etching Process ◽

Atmospheric Plasma

Download Full-text

Fab-wide equipment monitoring and FDC system

2006 IEEE International Symposium on Semiconductor Manufacturing ◽

10.1109/issm.2006.4493037 ◽

2006 ◽

Cited By ~ 1

Author(s):

Shin-ichi Imai ◽

Naoaki Sato ◽

Masaki Kitabata ◽

Satoshi Yasuda

Keyword(s):

Equipment Monitoring

Download Full-text

Integrated Production Control System in Managing Tool Uptime, Cycle-time and Capacity

2006 IEEE International Symposium on Semiconductor Manufacturing ◽

10.1109/issm.2006.4493083 ◽

2006 ◽

Cited By ~ 1

Author(s):

Chan Chih Ming ◽

Tan Pei Ling ◽

Muralitharan Subramaniam ◽

Ong Soon Guan

Keyword(s):

Control System ◽

Cycle Time ◽

Production Control ◽

Integrated Production ◽

Production Control System

Download Full-text

Method of Minimizing Inspection Cost by Making Use of Programmed Defect Array

2006 IEEE International Symposium on Semiconductor Manufacturing ◽

10.1109/issm.2006.4493010 ◽

2006 ◽

Author(s):

Takahide Hayano ◽

Amy Tu ◽

Bryon Hance ◽

Samantha Doan ◽

Stacy Sakai ◽

...

Keyword(s):

Inspection Cost

Download Full-text

Conveyer Belt Model to Analyze Cycle Time Conditions in a Semiconductor Manufacturing Line

2006 IEEE International Symposium on Semiconductor Manufacturing ◽

10.1109/issm.2006.4493026 ◽

2006 ◽

Cited By ~ 4

Author(s):

Toshikazu Inoue ◽

Yoshio Ishii ◽

Kouichi Igarashi ◽

Hideo Takagi ◽

Taka Muneta ◽

...

Keyword(s):

Cycle Time ◽

Semiconductor Manufacturing ◽

Conveyer Belt ◽

Manufacturing Line

Download Full-text

Improved CVD-Al Thin Film Using Superior Al Precursor

2006 IEEE International Symposium on Semiconductor Manufacturing ◽

10.1109/issm.2006.4493118 ◽

2006 ◽

Author(s):

Seung-Min Ryu ◽

Jun-Hyun Cho ◽

Youn-Jaung Cho ◽

Jung-Ho Lee ◽

Jung-Sik Choi ◽

...

Keyword(s):

Thin Film ◽

Al Thin Film

Download Full-text

Supply Chain Inventory Control in Semiconductor Manufacturing

2006 IEEE International Symposium on Semiconductor Manufacturing ◽

10.1109/issm.2006.4493024 ◽

2006 ◽

Cited By ~ 1

Author(s):

Ruey-Shan Guo ◽

David Chiang ◽

Po-Chun Yang

Keyword(s):

Supply Chain ◽

Inventory Control ◽

Semiconductor Manufacturing

Download Full-text

Laser Scattering Microhaze Correlation with Polysilicon Surface Roughness and Impact on Electrical Performance

2006 IEEE International Symposium on Semiconductor Manufacturing ◽

10.1109/issm.2006.4493042 ◽

2006 ◽

Author(s):

David K. Chen ◽

Andy Steinbach ◽

Matt Yeh ◽

C.-C. Chen ◽

S.-C. Chen ◽

...

Keyword(s):

Surface Roughness ◽

Electrical Performance ◽

Laser Scattering

Download Full-text

Distributive and Cooperative Scheduling Considering Multi-Attribute Product-Mix, Feedback Process, and the Dynamic Utility Control-in Resource Sharing

2006 IEEE International Symposium on Semiconductor Manufacturing ◽

10.1109/issm.2006.4493075 ◽

2006 ◽

Cited By ~ 1

Author(s):

Sumika Arima ◽

Yuta Sato ◽

Tomoya Saitou ◽

Randall Perez ◽

Yoshihiro Ishii ◽

...

Keyword(s):

Resource Sharing ◽

Feedback Process ◽

Product Mix ◽

Cooperative Scheduling

Download Full-text

2006 IEEE International Symposium on Semiconductor ManufacturingLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Environmentally Friendly Single-Wafer Spin Cleaning Using Ultra-diluted HF/Nitrogen Jet Spray without Causing Structural Damage and Material Loss

Application of Atmospheric Plasma Abatement System for Exhausted Gas from MEMS Etching Process

Fab-wide equipment monitoring and FDC system

Integrated Production Control System in Managing Tool Uptime, Cycle-time and Capacity

Method of Minimizing Inspection Cost by Making Use of Programmed Defect Array

Conveyer Belt Model to Analyze Cycle Time Conditions in a Semiconductor Manufacturing Line

Improved CVD-Al Thin Film Using Superior Al Precursor

Supply Chain Inventory Control in Semiconductor Manufacturing

Laser Scattering Microhaze Correlation with Polysilicon Surface Roughness and Impact on Electrical Performance

Distributive and Cooperative Scheduling Considering Multi-Attribute Product-Mix, Feedback Process, and the Dynamic Utility Control-in Resource Sharing

2006 IEEE International Symposium on Semiconductor Manufacturing
Latest Publications