Electroceramic-Based MEMS - Electronic Materials: Science and Technology
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Published By Springer US

9780387233109, 9780387233192

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Micromachined Infrared Detectors Based on Pyroelectric Thin Films

Electroceramic-Based MEMS - Electronic Materials: Science and Technology ◽

10.1007/0-387-23319-9_5 ◽

2005 ◽

pp. 81-113 ◽

Cited By ~ 3

Author(s):

P. Muralt

Keyword(s):

Thin Films ◽

Infrared Detectors

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Thick-Film Piezoelectric and Magnetostrictive Devices

Electroceramic-Based MEMS - Electronic Materials: Science and Technology ◽

10.1007/0-387-23319-9_4 ◽

2005 ◽

pp. 49-79 ◽

Cited By ~ 1

Author(s):

N.M. White ◽

S.P. Beeby ◽

N.J. Grabham

Keyword(s):

Thick Film ◽

Magnetostrictive Devices

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Low-Cost Patterning of Ceramic Thin Films

Electroceramic-Based MEMS - Electronic Materials: Science and Technology ◽

10.1007/0-387-23319-9_15 ◽

2005 ◽

pp. 387-410 ◽

Cited By ~ 1

Author(s):

C. R. Martin ◽

I. A. Aksay

Keyword(s):

Thin Films ◽

Low Cost ◽

Ceramic Thin Films

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Microactuators Based on Thin Films

Electroceramic-Based MEMS - Electronic Materials: Science and Technology ◽

10.1007/0-387-23319-9_2 ◽

2005 ◽

pp. 19-35 ◽

Cited By ~ 7

Author(s):

R. Maeda ◽

J.J. Tsaur ◽

S.H. Lee ◽

M. Ichiki

Keyword(s):

Thin Films

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Thin Film Piezoelectrics for MEMS

Electroceramic-Based MEMS - Electronic Materials: Science and Technology ◽

10.1007/0-387-23319-9_10 ◽

2005 ◽

pp. 199-215 ◽

Cited By ~ 9

Author(s):

S. Trolier-McKinstry ◽

P. Muralt

Keyword(s):

Thin Film

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MEMS-Based Thin Film and Resonant Chemical Sensors

Electroceramic-Based MEMS - Electronic Materials: Science and Technology ◽

10.1007/0-387-23319-9_1 ◽

2005 ◽

pp. 3-17 ◽

Cited By ~ 2

Author(s):

H. L. Tuller

Keyword(s):

Thin Film ◽

Chemical Sensors

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Ceramic Thick Films for MEMS

Electroceramic-Based MEMS - Electronic Materials: Science and Technology ◽

10.1007/0-387-23319-9_9 ◽

2005 ◽

pp. 177-197 ◽

Cited By ~ 1

Author(s):

R.A. Dorey ◽

R.W. Whatmore

Keyword(s):

Thick Films

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MEMS for Optical Functionality

Electroceramic-Based MEMS - Electronic Materials: Science and Technology ◽

10.1007/0-387-23319-9_8 ◽

2005 ◽

pp. 157-174

Author(s):

S.-G. Kim ◽

G. Barbastathis ◽

H. L. Tuller

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Microfabrication of Piezoelectric MEMS

Electroceramic-Based MEMS - Electronic Materials: Science and Technology ◽

10.1007/0-387-23319-9_13 ◽

2005 ◽

pp. 325-359 ◽

Cited By ~ 1

Author(s):

J. Baborowski

Keyword(s):

Piezoelectric Mems

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Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics

Electroceramic-Based MEMS - Electronic Materials: Science and Technology ◽

10.1007/0-387-23319-9_14 ◽

2005 ◽

pp. 361-385

Author(s):

M. Alexe ◽

C. Harnagea ◽

D. Hesse

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Electroceramic-Based MEMS - Electronic Materials: Science and TechnologyLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Springer US

Micromachined Infrared Detectors Based on Pyroelectric Thin Films

Thick-Film Piezoelectric and Magnetostrictive Devices

Low-Cost Patterning of Ceramic Thin Films

Microactuators Based on Thin Films

Thin Film Piezoelectrics for MEMS

MEMS-Based Thin Film and Resonant Chemical Sensors

Ceramic Thick Films for MEMS

MEMS for Optical Functionality

Microfabrication of Piezoelectric MEMS

Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics

Electroceramic-Based MEMS - Electronic Materials: Science and Technology
Latest Publications