Handbook of Silicon Based MEMS Materials and Technologies
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Published By Elsevier

9780128177860

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Microfluidics and bioMEMS in silicon

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-12-817786-0.00022-0 ◽

2020 ◽

pp. 547-563

Author(s):

Sami Franssila ◽

Cristina E. Davis ◽

Michael K. LeVasseur ◽

Zhen Cao ◽

Levent Yobas

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MEMS testing and calibration

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-12-817786-0.00043-8 ◽

2020 ◽

pp. 845-850

Author(s):

Vesa Henttonen

Keyword(s):

Mems Testing

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Gyroscopes

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-12-817786-0.00046-3 ◽

2020 ◽

pp. 899-914

Author(s):

Giorgio Allegato ◽

Carlo Valzasina ◽

Luca Zanotti

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Recent progress in large-scale electronic state calculations and data-driven sciences

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-12-817786-0.00014-1 ◽

2020 ◽

pp. 387-396

Author(s):

Takeo Hoshi ◽

Satoshi Itoh

Keyword(s):

Electronic State ◽

Large Scale ◽

Recent Progress ◽

Data Driven

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Silicon wafers preparation and properties

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-12-817786-0.00004-9 ◽

2020 ◽

pp. 93-110

Author(s):

Markku Tilli

Keyword(s):

Silicon Wafers

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Wafer-bonding equipment

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-12-817786-0.00029-3 ◽

2020 ◽

pp. 651-667

Author(s):

Viorel Dragoi ◽

Paul F. Lindner

Keyword(s):

Wafer Bonding

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Microphones

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-12-817786-0.00048-7 ◽

2020 ◽

pp. 937-948

Author(s):

Marc Fueldner

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Anodic bonding

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-12-817786-0.00024-4 ◽

2020 ◽

pp. 581-592

Author(s):

Adriana Cozma ◽

Henrik Jakobsen

Keyword(s):

Anodic Bonding

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Dicing of MEMS devices

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-12-817786-0.00031-1 ◽

2020 ◽

pp. 677-689

Author(s):

Devin Martin ◽

Scott Sullivan ◽

Indranil Ronnie Bose ◽

Christof Landesberger ◽

Robert Wieland

Keyword(s):

Mems Devices

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Inkjet printing, laser-based micromachining, and micro–3D printing technologies for MEMS

Handbook of Silicon Based MEMS Materials and Technologies ◽

10.1016/b978-0-12-817786-0.00021-9 ◽

2020 ◽

pp. 531-545

Author(s):

Andreas C. Fischer ◽

Matti Mäntysalo ◽

Frank Niklaus

Keyword(s):

3D Printing ◽

Inkjet Printing

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Handbook of Silicon Based MEMS Materials and TechnologiesLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Elsevier

Microfluidics and bioMEMS in silicon

MEMS testing and calibration

Gyroscopes

Recent progress in large-scale electronic state calculations and data-driven sciences

Silicon wafers preparation and properties

Wafer-bonding equipment

Microphones

Anodic bonding

Dicing of MEMS devices

Inkjet printing, laser-based micromachining, and micro–3D printing technologies for MEMS

Handbook of Silicon Based MEMS Materials and Technologies
Latest Publications