MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388)

A numerical simulation on the flow field of the novel pneumatic actuator system realised by micro-EDM

MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388) ◽

10.1109/mhs.1998.745754 ◽

2002 ◽

Author(s):

T. Hirata ◽

O.T. Guenat ◽

T. Akashi ◽

M.-A. Gretillat ◽

N.F. de Rooij

Keyword(s):

Numerical Simulation ◽

Flow Field ◽

Pneumatic Actuator ◽

Micro Edm ◽

The Novel ◽

Actuator System

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Ultra-fine piercing by SiC fiber punch

MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388) ◽

10.1109/mhs.1998.745750 ◽

2002 ◽

Cited By ~ 2

Author(s):

T. Mori ◽

K. Nakashima ◽

D. Tokumoto

Keyword(s):

Sic Fiber

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Study on fabrication of high aspect ratio electrostatic microactuators using LIGA process

MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388) ◽

10.1109/mhs.1998.745772 ◽

2002 ◽

Author(s):

R. Kondo ◽

K. Suzuki ◽

S. Sugiyama

Keyword(s):

Aspect Ratio ◽

High Aspect Ratio

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Application of MEMS technology in automotive sensors and actuators

MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388) ◽

10.1109/mhs.1998.745744 ◽

2002 ◽

Cited By ~ 6

Author(s):

D.R. Sparks

Keyword(s):

Sensors And Actuators ◽

Mems Technology ◽

Automotive Sensors

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A study of diffusion in layered thin film [MEMS]

MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388) ◽

10.1109/mhs.1998.745753 ◽

2002 ◽

Author(s):

T. Yamamoto ◽

H. Kotera ◽

T. Hirasam ◽

Y. Sakamoto ◽

S. Shima

Keyword(s):

Thin Film ◽

Layered Thin Film

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Micromachine technology development and its applications

MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388) ◽

10.1109/mhs.1998.745745 ◽

2002 ◽

Cited By ~ 1

Author(s):

S. Akita

Keyword(s):

Technology Development

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Stick and slip actuators: design, control, performances and applications

MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388) ◽

10.1109/mhs.1998.745756 ◽

2002 ◽

Cited By ~ 40

Author(s):

J.-M. Breguet ◽

R. Clavel

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Anisotropic etching properties of silicon in KOH and TMAH solutions

MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388) ◽

10.1109/mhs.1998.745752 ◽

2002 ◽

Cited By ~ 8

Author(s):

K. Tokoro ◽

D. Uchikawa ◽

M. Shikida ◽

K. Sato

Keyword(s):

Anisotropic Etching

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Experimental investigation of a distributed conveyance system using air flow

MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388) ◽

10.1109/mhs.1998.745781 ◽

2002 ◽

Cited By ~ 8

Author(s):

S. Konishi ◽

Y. Mizoguchi ◽

M. Harada ◽

K. Ohno

Keyword(s):

Experimental Investigation ◽

Air Flow

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A new type of capsule micropump using ICPF actuator

MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388) ◽

10.1109/mhs.1998.745795 ◽

2002 ◽

Cited By ~ 1

Author(s):

S. Guo ◽

S. Hata ◽

K. Sugumoto ◽

T. Fukuda ◽

K. Oguro

Keyword(s):

New Type

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MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388)
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

A numerical simulation on the flow field of the novel pneumatic actuator system realised by micro-EDM

Ultra-fine piercing by SiC fiber punch

Study on fabrication of high aspect ratio electrostatic microactuators using LIGA process

Application of MEMS technology in automotive sensors and actuators

A study of diffusion in layered thin film [MEMS]

Micromachine technology development and its applications

Stick and slip actuators: design, control, performances and applications

Anisotropic etching properties of silicon in KOH and TMAH solutions

Experimental investigation of a distributed conveyance system using air flow

A new type of capsule micropump using ICPF actuator

Export Citation Format

MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

A numerical simulation on the flow field of the novel pneumatic actuator system realised by micro-EDM

Ultra-fine piercing by SiC fiber punch

Study on fabrication of high aspect ratio electrostatic microactuators using LIGA process

Application of MEMS technology in automotive sensors and actuators

A study of diffusion in layered thin film [MEMS]

Micromachine technology development and its applications

Stick and slip actuators: design, control, performances and applications

Anisotropic etching properties of silicon in KOH and TMAH solutions

Experimental investigation of a distributed conveyance system using air flow

A new type of capsule micropump using ICPF actuator

MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388)
Latest Publications