Ion Implantation and Activation
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Published By BENTHAM SCIENCE PUBLISHERS

9781608057924

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Experimental Data Associated with Transient Diffusion

Ion Implantation and Activation ◽

10.2174/9781608057924113030005 ◽

2013 ◽

pp. 56-82

Keyword(s):

Experimental Data ◽

Transient Diffusion

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Thermal Oxidation

Ion Implantation and Activation ◽

10.2174/9781608057924113030007 ◽

2013 ◽

pp. 101-119

Keyword(s):

Thermal Oxidation

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Preface

Ion Implantation and Activation ◽

10.2174/9781608057924113030001 ◽

2013 ◽

pp. i-ii

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Acknowledgements

Ion Implantation and Activation ◽

10.2174/9781608057924113030002 ◽

2013 ◽

pp. iii-iii

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Diffusion Under Thermal Equilibrium

Ion Implantation and Activation ◽

10.2174/9781608057924113030003 ◽

2013 ◽

pp. 3-34

Keyword(s):

Thermal Equilibrium

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Paring Diffusion Equation

Ion Implantation and Activation ◽

10.2174/9781608057924113030004 ◽

2013 ◽

pp. 35-55

Keyword(s):

Diffusion Equation

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Segregation

Ion Implantation and Activation ◽

10.2174/9781608057924113030008 ◽

2013 ◽

pp. 120-127

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Index

Ion Implantation and Activation ◽

10.2174/9781608057924113030010 ◽

2013 ◽

pp. 205-207

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Analytical Diffusion Profiles Under Various Boundary Conditions

Ion Implantation and Activation ◽

10.2174/9781608057924113030009 ◽

2013 ◽

pp. 128-204

Keyword(s):

Boundary Conditions ◽

Various Boundary Conditions ◽

Diffusion Profiles

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Simple Treatment of Transient Enhanced Diffusion

Ion Implantation and Activation ◽

10.2174/9781608057924113030006 ◽

2013 ◽

pp. 83-100

Keyword(s):

Enhanced Diffusion ◽

Simple Treatment ◽

Transient Enhanced Diffusion

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