Microsystem Technology
Latest Publications

TOTAL DOCUMENTS

13

(FIVE YEARS 0)

H-INDEX

1

(FIVE YEARS 0)

Published By Wiley-VCH Verlag Gmbh

9783527613007, 9783527296347

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Silicon Microsystem Technology

Microsystem Technology ◽

10.1002/9783527613007.ch06 ◽

2007 ◽

pp. 209-287

Keyword(s):

Microsystem Technology

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Packaging and Interconnecting Techniques (PIT)

Microsystem Technology ◽

10.1002/9783527613007.ch09 ◽

2007 ◽

pp. 403-430

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Alternative Processes of Microstructuring

Microsystem Technology ◽

10.1002/9783527613007.ch08 ◽

2007 ◽

pp. 381-401

Keyword(s):

Alternative Processes

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The Parallels to Microelectronics

Microsystem Technology ◽

10.1002/9783527613007.ch02 ◽

2007 ◽

pp. 15-44

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System Technology

Microsystem Technology ◽

10.1002/9783527613007.ch10 ◽

2007 ◽

pp. 431-463

Keyword(s):

System Technology

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Liteature

Microsystem Technology ◽

10.1002/9783527613007.oth1 ◽

2007 ◽

pp. 465-483 ◽

Cited By ~ 1

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General Introduction to Microstructure Technology

Microsystem Technology ◽

10.1002/9783527613007.ch01 ◽

2007 ◽

pp. 1-13

Keyword(s):

General Introduction ◽

Microstructure Technology

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Lithography

Microsystem Technology ◽

10.1002/9783527613007.ch05 ◽

2007 ◽

pp. 171-208

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Frontmatter

Microsystem Technology ◽

10.1002/9783527613007.fmatter ◽

2007 ◽

pp. I-XII

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Basic Technologies in MEMS

Microsystem Technology ◽

10.1002/9783527613007.ch04 ◽

2007 ◽

pp. 109-170

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